Recently, there have been many researches for nano-storage device using PZT thin films. From previous study, we knew that the stable bit size was similar to the film thickness and PZT thin film had the thickness lower than 100nm and excellent properties such as ferroelectricity, piezoelectricity and...
#Nano film Surface roughness Degradation of properties Piezoelectric property 나노박막 PZT 표면 거칠기 특성 열화 압전성;
|총페이지||ix, 155 p.|
|키워드||Nano film Surface roughness Degradation of properties Piezoelectric property 나노박막 PZT 표면 거칠기 특성 열화 압전성|
DOI 인용 스타일