Hydrogen doped zinc oxide films were prepared on glass substrate by using rf reactive magnetron sputtering method and the films were annealed in vacuum furnace. The reactive sputtering was carried out at the atmosphere of argon, oxygen and hydrogen. The gas composition of hydrogen was changed from 0...
#Hydrogen Zinc oxide Sputtering Electrical conductivity Optical transmittance 수소 산화아연 스퍼터링 전기전도도 광투과율;
|키워드||Hydrogen Zinc oxide Sputtering Electrical conductivity Optical transmittance 수소 산화아연 스퍼터링 전기전도도 광투과율|
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