• 검색어에 아래의 연산자를 사용하시면 더 정확한 검색결과를 얻을 수 있습니다.
  • 검색연산자
검색연산자 기능 검색시 예
() 우선순위가 가장 높은 연산자 예1) (나노 (기계 | machine))
공백 두 개의 검색어(식)을 모두 포함하고 있는 문서 검색 예1) (나노 기계)
예2) 나노 장영실
| 두 개의 검색어(식) 중 하나 이상 포함하고 있는 문서 검색 예1) (줄기세포 | 면역)
예2) 줄기세포 | 장영실
! NOT 이후에 있는 검색어가 포함된 문서는 제외 예1) (황금 !백금)
예2) !image
* 검색어의 *란에 0개 이상의 임의의 문자가 포함된 문서 검색 예) semi*
"" 따옴표 내의 구문과 완전히 일치하는 문서만 검색 예) "Transform and Quantization"
쳇봇 이모티콘
ScienceON 챗봇입니다.
궁금한 것은 저에게 물어봐주세요.

논문 상세정보

Rigorous coupled-wave analysis of antireflective surface-relief gratings


Rigorous coupled-wave analysis (RCWA) with a simplified eigenvalue problem is used to investigate the an-tireflective property of one-dimensional surface-relief gratings such as binary gratings, triangular gratings and gratings with triangle-like surface profiles. The convergence of RCWA is investigated by varying the number of layers and the number of space-harmonics used in the computation. For unpolarized light normally incident on a medium of refractive index 1.64 from vaccum, a triangle-like grating shows the reflectivity of $1.6 {\times} 10^{-4}$ in contrast to a minimum reflectivity of $3.8 {\times} 10^{-3}$ for a binary grating. We also study the dependence of reflectivity on the wavelength, and on the angle of incidence for a groove shape and depth which result in minimum reflectivity.

저자의 다른 논문

참고문헌 (24)

  1. T. K. Gaylord and M. G. Moharam, 'Analysis and Ap-plications of Optical Diffraction by Gratings,' Proc. IEEE 73, 894-937 (1985) 
  2. E. N. Glytsis, T. K. Gaylord, and D. L. Brundrett, 'Rigorous coupled-wave analysis and applications of grat-ing diffraction,' in Diffractive and Miniaturized Optics, Crit-ical Reviews of Optical Science and Technology Vol. CR 49, S. H. Lee, ed. (SPIE, Bellingham, 1993) pp.3-31 
  3. P. Kipfer, M. Collischon, H. Haidner, and J. Schwider, 'Subwavelength structures and their use in diffractive op-tics,' Opt. Eng. 35, 726-731 (1996) 
  4. Y. Ono, Y. Kimura, Y. Ohta, and N. Nishida, 'Antireflection effect in ultrahigh spatial-frequency hol-ographic relief gratings,' Appl. Opt. 26, 1142-1146 (1987) 
  5. D. H. Raguin and G. M. Morris, 'Antireflection struc-tured surfaces for the infrared spectral region,' Appl. Opt. 32,1154-1167 (1993) 
  6. D. H. Raguin and G. M. Morris, 'Analysis of an-tireflection-structured surfaces with continuous one-di-mensional surface profiles,' Appl. Opt. 32, 2582-2598 (1993) 
  7. E. B. Grann and M. G. Moharam, 'Comparison between continuous and discrete subwavelength grating structures tor antireflectjon surfaces,' J. Opt. Soc. Am. A13, 988-992 (1996) 
  8. M. G. Moharam and T. K. Gaylord, 'Three-dimensional vector coupled-wave analysis of planar-grating diffraction,' J. Opt. Soc. Am, 73, 1105-1112 (1983) 
  9. D. Cho, 'Eigenvalue problem pertaining to the rigorous three-dimensional vector coupled-wave analysis of dif-fraction from surface-relief gratings,' Hankook Kwanghak Hoeji 5, 439-444 (1994) 
  10. netlib, Oak Ridge National Laboratory, Oak Ridge, TN, U.S.A. 
  11. R. Petit, Ed., Electromagnetic Theory of Gratings, Topics in Current Physics, Vol.22 (Springer-Verlag, Berlin, 1980) 
  12. D. Maystre, Selected papers on diffraction gratings, SPIE Milestone Series Vol. MS83 (SPIE, Bellingham, 1993) 
  13. D. H. Raguin, S. Norton and G. M. Morris, 'Subwavelength structured surfaces and their applications,' in Diffractive and Miniaturized Optics, Critical Reviews of Optical Science and Technology Vol. CR49, S. H. Lee, ed. (SPIE, Bellingham, 1993) pp.234-261 
  14. W. H. Southwell, 'Pyramid-array surface-relief structures producing antireflection index matching on optical sur-faces,' J. Opt. Soc. Am. A8, 549-553 (1991) 
  15. M, G, Moharam and T. K. Gaylord, 'Diffraction analysis of dielectric surface-relief gratings,' J. Opt. Soc. Am. 72, 1385-1392 (1982) 
  16. M, G. Moharam, 'Coupled-Wave Analysis of Two-di-mensional Dielectric Gratings,' Proc. Soc. Photo-Opt. In-strum, Eng. 883, 8-11 (1988) 
  17. L. Li and C. W. Haggans, 'Convergence of the coupled-wave methods for metallic lamellar diffraction gratings,' J. Opt. Soc. Am. A10, 1184-1189 (1993) 
  18. M. E. Motamedi, W. H. Southwell, and W. J. Gunning, 'Antireflection surfaces in silicon using binary optics tech-nology,' Appl. Opt. 31,4371-4375 (1992) 
  19. T. K. Gaylord, W. E. Baird, and M. G. Moharam, 'Zero-reflectivitv high spatial frequency rectangular-groove dielectric surface-relief gratings,' Appl. Opt. 25, 4562-4567 (1986) 
  20. E. N. Glytsis and T. K. Gaylord, 'Antireflection surface structure: dielectric layer( s) over a high spatial-frequency surface-relief gratings on a lossy substrate,' Appl. Opt. 27, 4288-4304 (1988) 
  21. D. L. Brundrett, E. N. Glytsis, and T. K. Gaylord, 'Homogeneous layer models for high- spatial-frequency dielectric surface-relief gratings: conical diffraction and an-tireflection designs,' Appl. Opt. 33, 2695-2706 (1994) 
  22. E. B. Grann, M. G. Moharam and D. A. Pommet, 'Artificial uniaxial and biaxial dielectrics with use of two-dimensional subwavelength binary gratings,' J. Opt. Soc. Am. A 11, 2695-2703 (1994) 
  23. E. B. Grann, M. G. Moharam and D. A. Pommet, 'Optimal design for antireflective tapered two-di-mensional subwavelength grating structures,' J. Opt. Soc. Am. A12, 333-339 (1995) 
  24. S. T. Han, Y. Tsao, R. M. Walser, and M. F. Becker, 'Electromagnetic scattering of two-dimensional surface-re-lief dielectric gratings,' Appl. Opt. 31, 2343-2352 (1992) 

이 논문을 인용한 문헌 (0)

  1. 이 논문을 인용한 문헌 없음


원문 PDF 다운로드

  • ScienceON :

원문 URL 링크

원문 PDF 파일 및 링크정보가 존재하지 않을 경우 KISTI DDS 시스템에서 제공하는 원문복사서비스를 사용할 수 있습니다. (원문복사서비스 안내 바로 가기)

상세조회 0건 원문조회 0건

DOI 인용 스타일