초록

TMCS(Trimethylchlorosilane)로 표면개질한 습윤겔을 에탄올에 재분산시켜 코팅용 재분산 실리카 졸을 제조하였고 제조된 졸을 실리콘 기판에 스핀 코팅한 후 상압 하에서 건조(8$0^{\circ}C$) 및 열처리(>25$0^{\circ}C$)하여 열처리온도에 따른 박막의 물성 변화를 관찰하였다. 습윤겔의 재분산시 안정한 재분산 실리카 졸의 제조를 위한 최적 재분산 조건을 습윤겔:에탄올=1g110$m\ell$로 하였고, 이렇게 제조된 재분산 실리카 졸의 농도와 점도는 각각 0.11 M, 2.0-2.2cP였으며 평균 졸 입자크기는 약 30nm정도였다. 1500rpm, 10회 스핀 코팅한 후 8$0^{\circ}C$에서 2시간 건조, 45$0^{\circ}C$에서 2시간 열처리에 의하여 굴절율이 약 1.14, 두께가 400nm정도인 균열이 없는 박막을 얻을 수 있었다.

Abstract

Wet gel with surface modification by TMCS was redispersed in EtOH and redispersed silica sol for coat-ing was prepared. After spin coating of redispersed sol was conducted on silicon substrate, processes of drying(8$0^{\circ}C$) and heat treatment(>25$0^{\circ}C$) were, followed at ambient pressure. The influence of heat treat-ment of properties of film was observed, changing temperature at heat treatment. The optimum redisp-ersion condition for stable silica sol was wet gel:EtOH=1g:110$m\ell$ and the concentration and viscosity of redispersed silica sol with average particle size of 30nm were 0.11 M, 2.0-2.2 cP respectively. Crack-free thin film with the refractive index of 1.14 and thickness of 400 nm was obtained through drying at 8$0^{\circ}C$ and subsequent heat treatment at 45$0^{\circ}C$ for 2 hrs respectively after spin coating of 1500rpm, 10 times.

주제어

#TMCS   #Surface modification   #Redispersion   #Ambient pressure   #Heat treatment   #Silica thin film   #Spin coating  

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참고문헌 (11)

1. Thin Acrogel Films for Optical, Thermal, Acoustic and Electronic Applications , L. W. Hrubesh;J. F. Poco , J. Non-Crystalline Solids / v.188,pp.46-53, 1995
   
2. P. H. Tewari;A J. Hunt;K. D. Loffus , Mater. Lett. / v.3,pp., 1985
   
3. R. K. Iler , The Chemistry of Silica / v.,pp., 1979
   
4. Effects of Aging and Solvent Exchange on Pore Structure of Silica Gels with Interconnected Macropores , Ryoji Takahashi;Kazuki Nakanishi , J. of. Non-Crystalline Solids. / v.189,pp.66-76, 1995
   
5. E. P. Plucddemann , Silane Coupling Agent / v.,pp., 1991
   
6. 초임계 건조에 의한 실리카 에어로겔의 저압합성 , 김동준;현상훈 , 요업학회지 / v.33,pp.485-494, 1996
   원문보기 상세보기
7. Sol-gel Strategies for Controlled Porosity Inorganic Materials , C. J. Brinker;R. Sehgal , J. of Membrane Science / v.94,pp.85-102, 1994
   
8. C. J. Brinker;G W Scherer , Sol-Gel Science / v.,pp., 1990
   
9. Silica Acrogel Film Prepared at Ambicnt Pressure by Using Surface Derivatization to Induce Reversible Drying Shrinkage , Sai S. Prakash;C. Jefferey Brinker , Lett. to Nature / v.,pp.374, 1995
   
10. Pore Structure Evolution in Silica Gel during Aging/drying , P. J Davis;C.J Brinker(et al.) , J Non-Crystalline Solids. / v.142,pp.197-207, 1992
    
11. Burtrand I. Lee , Chemical Processing of Ceramics / v.,pp.314-315, 1994
    

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