Abstract

In the case of a precision equipment, it requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga class semiconductor wafers. This high technology equipments require very strict environmental vibration standard in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria are usually obtained either by the real vibration exciting test on the equipment or by the analytical calculation. This paper proposes a new method to solve this problem at a time. The permissible vibration level to a precision equipment can be easily obtained by analyzing a process of Frequency Response Function. This paper also demonstrates its effectiveness by applying the proposed method to finding the vibration criteria of a Computer Hard Disk Driver by Impact Test.

주제어

#충격시험   #주파수응답함수   #진동성능시험   #진동허용규제치   #진동민감장비   #상대진동변위   #상대허용진동변위   #가진력허용규제치  

저자의 다른 논문

참고문헌 (15)

1. Survey of Excitation Techniques Applicable to the Testing of Automotive Structures , D. Brown;G. Carbon;K. Ramsey , Society of Automotive Engineers, Paper No.770029 / v.,pp., 1977
   
2. SMS STAR Theory and Application, Issue A / v.25,pp., 1990
   
3. D. J. Ewins , Modal Testing; Theory and Practice / v.,pp., 0000
   
4. ANSI S2.32-1982 , Methods for the Experimental Determi- nation of Mechanical Mobility / v.,pp., 0000
   
5. Parameter Estimation Techniques for Modal Analysis , D. S. Brown;R. J. Allemang;Ray Zimmerman;M. Mergeay , SAE Paper No. 790221 / v.,pp., 1979
   
6. A Multi-Input Modal Estimation Algorithm for Mini-Computers , Harvard Vold;John Kundrat e. g , SAE Paper, No. 8201194 / v.,pp., 1982
   
7. Designing Sensitive Equipment and Facilities , Eric E. Ungar , Mechanical Engineering / v.,pp., 1985
   
8. Vibration Control Design of High Technology Facilities , Eric E. Ungar , Sound and Vibration / v.,pp., 1990
   
9. Vibration Control Wafer Manufacturing Facilities , Donald E. Baxa , Semiconductor International / v.,pp.123-126, 1985
   
10. Micralign M500 Sensitivity to Floor Vibration and Acoustic Disturbances , PERKIN-ELMER Semiconductor Equipment Group , MLD 0036 / v.,pp., 1989
    
11. Pilips Electron Optics , PW6041/xx; CM300 Series Transmission Electron Microscopes Pre-Installation Manual(First edition 4822 870 10409 940927) / v.,pp.8.1-8.4, 0000
    
12. Park Scientific Instruments , PSI Products Bulletin - Facility Requirements for AutoProbe M5 / v.,pp., 1995
    
13. Disk Drive Spindle Dynamics-Analysis and Measurement , G. M. Frees , ASME Adv. Info. Storage System / v.6,pp.237-262, 1995
    
14. On the Dynamics of Rocking Motion of the Hard Disk Drive Spindle Motor System , J. Wang , Advances in Information Storage Systems / v.7,pp., 1991
    
15. Vibration tolerance in optical imaging , B. J. Lin , Optical/Laser Lithography Ⅱ / v.1088,pp.106-114, 1989
    

이 논문을 인용한 문헌 (0)

1. 이 논문을 인용한 문헌 없음