Abstract

The performance of a turbomolecular pump(TMP) in both molecular and transition flow regions is predicted by the numerical solutions of the Boltzmann equation obtained by the direct simulation Monte Carlo method. The compression characteristics of the TMP are investigated for a wide range of the Knudsen number( Kn ). The maximum compression ratios strongly depend on Kn in transition region, while do they weakly on Kn in free molecular flow region. The present numerical results of the single blade row in both molecular and transition regions are used to predict the overall performance of a TMP, which has three kinds of blade with 24-rows.

주제어

#터보분자펌프   #분자천이유동   #DSMC법   #압축비   #누센수  

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