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Simulations of Capacitively Coupled Plasmas Between Unequal-sized Powered and Grounded Electrodes Using One- and Two-dimensional Fluid Models 원문보기

KIEE international transactions on electrophysics and applications, v.4C no.5, 2004년, pp.220 - 229  

So, Soon-Youl (Division of Electronics and Information Engineering, Graduate School of Engineering, Hokkaido University)

Abstract ▼ AI-Helper 아이콘AI-Helper

We have examined a technique of one-dimensional (1D) fluid modeling for radio-frequency Ar capacitively coupled plasmas (CCP) between unequal-sized powered and grounded electrodes. In order to simulate a practical CCP reactor configuration with a grounded side wall by the 1D model, it has been assum...

주제어

#asymmetric geometry   #DC self-bias voltage   #fluid model   #RF plasmas  

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제안 방법

  • In this paper, we focus on the extent to which a ID model can reflect a 2D model, asymmetrical structures and comparison between ID and 2D models consisting of symmetric or asymmetric geometry. We present analyses of Ar CCP driven at a radio frequency (RF) of 13.
  • The particle flow is treated in the ID manner, but the plasma properties such as the flux and the density are calculated considering the z-dependent plasma volume. The radius of the powered electrode, RP, is fixed at 5.0 (㎝), and that of the grounded electrode, RG, is changed from 5.0 (㎝) to 30.0 (㎝) to evaluate the approximation by the AID model and to observe the geometry dependence of the plasma properties including the DC self-bias voltage. Further details of the numerical scheme are explained in the subsection asymmetric model.

이론/모형

  • The numerical method to solve the fluid equations above is based on the Scharfetter-Gummel discretization scheme of the drift-diffusion equations [12, 13]. In a cylindrical coordinate system, the governing equations are discretized in the axial and the radial components, z and r.
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참고문헌 (21)

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  2. Soon-Youl So, Oda A., Sugawara H. and Sakai Y., 'Transient behavior of CF4 rf plasmas after step changes of power source voltage', J. Phys. D, Vol. 34, pp. 1919-1927, 2001 

  3. Boeuf J. P. and Pitchford L. C., 'Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactor', Phys. Rev. E, Vol. 51, pp. 1376-1390, 1995 

  4. Rauf S. and Kushner M. J., 'Argon metastable densities in radio frequency Ar, Ar/ $O_2$ and Ar/ $CF_4$ electrical discharge', J. Appl. Phys., Vol. 82, pp. 2805-2813, 1997 

  5. Ho-Jun Lee, Dong-Hyun Kim and Chung-Hoo Park, 'A Two-dimensional Steady State Simulation Study on the Radio Frequency Inductively Coupled Argon Plasma', KIEE Int. Trans. on EA, Vol. 2-C, No. 5, pp. 246-252, 2002 

  6. Youl-Moon Sung, Hee-Je Kim and Chung-Hoo Park, 'Laser Thomson Scattering Measurements and Modelling on the Electron Behavior in a Magnetic Neutral Loop Discharge Plasma', KIEE Int. Trans. on EA, Vol. 11C, No. 4, pp. 107-112, 2001 

  7. Kohler K., Coburn J. W., Horne D. E., Kay E. and Keller J. H., 'Plasma potentials of 13.56MHz rf argon glow discharges in a planar system, J. Appl. Phys., Vol. 57, pp. 59-66, 1985 

  8. Barnes M. S., Colter T. J. and Elta M. E., 'Largesignal time-domain modeling of low-pressure rf glow dishcarges', J. Appl. Phys., Vol. 61, pp. 81-89, 1987 

  9. Joon-Yub Kim, 'A New Sustain Driving Method for AC PDP: Charge-Controlled Driving Method', KIEE Int. Trans. on EA, Vol. 2-C, No. 5, pp. 292-296, 2002 

  10. Joon-Yub Kim and Jong-Sik Lim, 'Current-Controlled Driving Method for AC PDP and Experimental Characterization', KIEE Int. Trans. on EA, Vol. 2-C, No. 5, pp. 253-257, 2002 

  11. Herrebout D., Bogaerts A., Yan M., Gijbels R., Goedheer W. and Vanhulsel A., ' Modeling of a capacitively coupled radio-frequency methane plasma; Comparison between a one-dimensional and a two-dimensional fluid model', J. Appl. Phys., Vol. 92, pp. 2290-2295, 2002 

  12. Scharfetter D. L. and Gummel G. K., IEEE Trans. Electron Devices, Vol. ED-16, pp. 64-77, 1969 

  13. Kulikovsky A. A., 'A More Accurate Scharfetter-Gummel Algorithm of Electron Transport for Semiconductor and Gas Discharge Simulation', J. Comp. Phys., Vol. 119, pp. 149-155, 1995 

  14. Sato N. and Shida Y., 'Two Dimensional Fluid Model of RF Plasmas in $SiH_4$ /Ar Mixtures', Jpn. J. Appl. Phys., Vol. 36, pp. 4794-4798, 1997 

  15. Ward A. L., 'Effect of Space Charge in Cold-Cathode Gas Discharges', Phys. Rev., Vol. 112, pp. 1852-1857, 1958 

  16. Richards A. D., Thompson B. E. and Sawin H. H., 'Continuum modeling of argon radio frequency glow discharges', Appl. Phys. Lett., Vol. 50, pp. 492-494, 1987 

  17. Golant V. E., 'Coefficient of ionization and mobility of electrons in argon', Sov. Phys. Tech. Phys., Vol. 4, pp. 680-682, 1959 

  18. Lowke J. J. and Davies D. K., 'Properties of electric discharges sustained by a uniform source of ionization', J. Appl. Phys., Vol. 48, pp. 4991-5000, 1977 

  19. Overzet L. J. and Hopkins M. B., 'Spatial variations in the charge density of argon discharges in the Gaseous Electronics Conference reference reactor', Appl. Phys. Lett., Vol. 63, pp. 484-486, 1993 

  20. McMillin K. B. and Zachariah M. K., 'Twodimensional laser-induced fluorescence imaging of metastable density in low-pressure radio frequency argon plasmas with added $O_2$ , $Cl_2$ , and $CF_4$ ', J. Appl. Phys., Vol. 79, pp. 77-85, 1996 

  21. Bogaerts A., Neyts E., Gijbels R. and van der Mullen J., 'Gas discharge plasmas and their applications', Spectrochimica Acta Pt. B: At. Spectrosc., Vol. 57, pp. 609-658, 2002 

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