선택한 단어 수는 입니다.
최소 단어 이상 선택하여야 합니다.
최소 단어 이상 선택하여야 합니다.
선택한 단어 수는 30입니다.
최대 10 단어까지만 선택 가능합니다.
최대 10 단어까지만 선택 가능합니다.
제안 방법
- In this study, ZnO thin films were grown at various plume-substrate (P-S) angles without changing other experimental parameters, such as energy density of laser, ambient gas pressure and the distance between a target and a substrate. The properties of ZnO thin films were systematically investigated as a function of P-S angle.
- The amount of ablated species arriving on a substrate per laser shot decreased as P-S angle decreased as shown in Table 1. The decrease of the amount of ablated species arriving on a substrate per laser shot in films grown by off-axis technique relaxes the supersaturation effect and results in the improvement of the film properties.
대상 데이터
- 99 % pure oxygen of 350 mTorr. The target was a 99.999 % pure ceramic ZnO target, and the distance between a target and the center of a substrate was 50 mm. The substrate temperature was at 400 ℃ and the thickness of ZnO thin films was about 7, 300 A.
이론/모형
- The optical properties of ZnO thin films were characterized by photoluminescence (PL) with a HeCd laser as a light source using the excitation wavelength of 325 nm and the power of 20 mW. The electrical properties were measured by Van der Pauw Hall measurements. All measurements were performed at room temperature.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.