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E-H Mode Transition Properties of Cylindrical ICP Hg:Kr 원문보기

KIEE international transactions on electrophysics and applications, v.5C no.3, 2005년, pp.124 - 130  

Yang Jong-Kyung (Dept. of Electrical materials Engineering, Wonkwang University) ,  Pack Kwang-Hyun (Dept. of Electrical materials Engineering, Wonkwang University) ,  Lee Jong-Chan (Kumho Electric Inc) ,  Park Dae-Hee (Dept. of Electrical and Electronic Engineering, Wonkwang University)

Abstract ▼ AI-Helper 아이콘AI-Helper

In this paper, we designed a cylindrical type light source having an electromagnetic principle of inductively coupled plasma, and measured its electrical-optical properties. Using the transformer principle, an electrically equivalent circuit cylindrical type light source was analyzed. According to t...

주제어

#E-H mode transition   #ICP   #Inductively coupled plasma  

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제안 방법

  • The cylindrical light source was analyzed as an equation using an electrically equivalent circuit based on the principle of a transformer. In addition, the physical mechanism was investigated by understanding the electromagnetic and optical property according to the change in the electromagnetic induction parameters, such as the coil diameter ((p0.3〜1.2mm), coil turns (4-12 turns), and coil distance (40〜120mm), and the RF power from 10W to 150W.
  • This paper designed and produced a cylindrical light source based on the principle of the ICP discharge, and investigated its electrical and optical properties. The cylindrical light source was analyzed as an equation using an electrically equivalent circuit based on the principle of a transformer.
  • Thus, this paper designed and produced a cylindrical light source based on the principle of the ICP type plasma radiation, and tested its electrical and optical properties. In addition, the cylindrical light source was formed as an equation by analyzing it using an electrically equivalent circuit based on the principle of a transformer.

대상 데이터

  • 56MHz consists of a voltage source of VT and output impedance of RT for a coaxial cable, and the induction coil consists of an inductance element of Lc and resistance element of R& There are various types of matching circuits between the RF power source and the inductance coil RF. The circuit used in this experiment was a L-type circuit, which connects two variable capacitors of Ci and Cz The inductance element was not used in this circuit because the inductance may cause a factor of output loss. In addition, the discharge tube was also expressed as an inductance element of Lp and resistance element of RP.
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참고문헌 (6)

  1. Annemie Bogaerts, Eric Neyts, Renaat Gilbels, Joost van der Mullen: 'Gas Discharge and their applications', Atomic Spectroscopy, Vol. 57, pp. 638-641 (2002) 

  2. D.O. Wharmby: 'Electrodeless lamps for lighting', IEE Proceedings A, Vol. 140 Issue: 6, Nov., pp. 465- 468 (1993) 

  3. I.M. EI-Fayoumi and I.R. Jones: 'The electromagnetic basis of the transformer model for an inductively coupled RF plasma source', Plasma sources Sci. Technol 7, 179-185 (1998) 

    상세보기 crossref

  4. T Czerwiec and D B Graves: 'Mode transitions in low pressure rare gas cylindrical ICP discharge studied by optical emission spectroscopy', J. Phys. D: Appl. Phys. 37 pp. 2827-2840 (2004) 

    상세보기 crossref

  5. W Bolton, 'Electrical and magnetic properties of materials', 82-84 (1992) 

  6. S.Xu, K.N Ostrikiv: 'Hysteresis and mode transition in a low-frequency inductively coupled plasma', J.Vac. Sc.Technology A, Vol. 18 (15), pp. 2185-2187 (2000) 

    상세보기 crossref

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