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NTIS 바로가기Journal of the Optical Society of Korea, v.9 no.1, 2005년, pp.16 - 21
Kwon Sangjin (Department of Mechatronics, Gwangju Institute of Science and Technology) , Kim Pilgyu (Department of Mechatronics, Gwangju Institute of Science and Technology) , Jeong Sungho (Department of Mechatronics, Gwangju Institute of Science and Technology) , Chang Wonseok (Nanoprocessing Group, Korea Institute of Machinery and Materials) , Chun Chaemin (Department of Materials Science and Engineering, Gwangju Institute of Science and Technology) , Kim Dong-Yu (Department of Materials Science and Engineering, Gwangju Institute of Science and Technology)
Using a cantilever type nanoprobe having a 100㎚m aperture at the apex of the pyramidal tip of a near-field scanning optical microscope (NSOM), nanopatterning of polymer films are conducted. Two different types of polymer, namely a positive photoresist (DPR-i5500) and an azopolymer (Poly disperse ora...
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