The differential heterodyne interferometer (DHI) is suitable for precise measurement of step height and line width, since its differential configuration can significantly reduce disturbances from the environment [1,2]. Like most phase measuring interferometers, however, the DHI is limited, in that it can obtain only the phase from 0 to 2π, because of the sinusoidal nature of the optical interference involved. Thus, the measurable step height is limited to one quarter of the wavelength of the light source. This study describes a confocal differential heterodyne interferometer (CDHI) for measuring step heights of several micrometers, with a high resolution and line width with high repeatability. The CDHI has a simple structure and rapid measurement speed.
원문 PDF 다운로드
원문 URL 링크
원문 PDF 파일 및 링크정보가 존재하지 않을 경우 KISTI DDS 시스템에서 제공하는 원문복사서비스를 사용할 수 있습니다. (원문복사서비스 안내 바로 가기)
DOI 인용 스타일