다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기
센서학회지 = Journal of the Korean Sensors Society, v.15 no.5, 2006년, pp.357 - 361
윤광석 (Mechanical and Aerospace Engineering Department, University of California)
AI-Helper
This paper reports a new technology to implement complex PDMS microchannels, which are simply constructed using three-dimensional photoresist structures as mold for PDMS replica process. The process utilizes LOR resist as a sacrificial layer to levitate the structural photoresist and multi-step expo...
* AI 자동 식별 결과로 적합하지 않은 문장이 있을 수 있으니, 이용에 유의하시기 바랍니다.
B.-H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, 'Three-dimensional micro-channel fabrication in polydimethylsiloxane(PDMS) elastomer', J. Microelectrornech. Syst., vol. 9, no. 1, pp. 76-81, 2000
F. G. Tseng, Y. J. Chuang, and W. K. Lin, 'A novel fabrication method of embedded micro channels employing simple UV dosage control and antire-flection coating', IEEE 15th International Conference on MEMS, pp. 69-72, 2002
F. E. H. Tay, J. A. V. Kan, F. Watt, and W. O. Choong, 'A novel micro-machining method for the fabrication of thick-film SU-8 embedded microchannels', J. Micrornech. Microeng., vol. 11, pp. 27-33, 2001
Y.-K. Yoon, J.-H. Park, F. Cros, and M. G. Allen, 'Integrated vertical screen microfilter system using inclined SU-8 structures', IEEE 16th International Conference on MEMS, pp. 227-230, 2003
M. Han, W. Lee, S.-K. Lee, and S. S. Lee, 'Fabrication of 30 microstructures with inclined/rotated UV lithography', IEEE 16th International Conference on MEMS, pp. 554-557, 2003
J. R. Anderson, O. T. Chiu, R. J. lackman, O. Cherniavskaya, J. C. McDonald, H. Wu, S. H. Whitesides, and G. M. Whitesides, 'Fabrication of topologically complex three-dimensional microfluidic systems in POMS by rapid prototyping', Anal. Chem., vol. 72, pp. 3158-3164, 2000
K.-S. Yun and E. Yoon, 'A micro/nano-fluidic chipbased micro-well array for high-throughput cell analysis and drug screening', Proceedings of $\mu$ TAS 2003, pp. 861-864, 2003
O. Hofmann, P. Niederrnann, and A. Manz, 'Modular approach to fabrication of three-dimensional microchannel systems in POMS-application to sheath flow microchips', Lab Chip, vol. 1, no. 2, pp. 108-114, 2001
K.-S. Yun and E. Yoon, 'Microfabrication of 3dimensional photoresist structures using selective patterning and development on two types of specific resists and its application to microfluidic components', IEEE International conference on MEMS, pp. 757-760, 2004
J.-B. Yoon, J.-D. Lee, C.-H. Han, E. Yoon, and C.K. Kim, 'Multilevel microstructure fabrication using single-step 30 photolithography and singlestep electroplating', Proc. SPIE, vol. 3512, pp. 358-366, 1998
*원문 PDF 파일 및 링크정보가 존재하지 않을 경우 KISTI DDS 시스템에서 제공하는 원문복사서비스를 사용할 수 있습니다.
출판사/학술단체 등이 한시적으로 특별한 프로모션 또는 일정기간 경과 후 접근을 허용하여, 출판사/학술단체 등의 사이트에서 이용 가능한 논문
Copyright KISTI. All Rights Reserved.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.