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NTIS 바로가기전기전자재료학회논문지 = Journal of the Korean institute of electronic material engineers, v.19 no.6, 2006년, pp.501 - 506
최성헌 (군산대학교 전자정보공학부) , 이재형 (군산대학교 전자정보공학부)
Carbon nanotubes (CNTs) were grown with a microwave plasma enhanced chemical vapor deposition (MPECVD) method, which has been regarded as one of the most promising candidates for the synthesis of CNTs due to the vertical alignment, the low temperature and the large area growth. MPECVD used methane (...
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