다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기
大韓機械學會論文集. Transactions of the Korean Society of Mechanical Engineers. A. A, v.30 no.6 = no.249, 2006년, pp.622 - 630
이상헌 (안동대학교 기계공학부)
AI-Helper
This paper is about the magnetic suspension stage based on the Switched Reluctance propulsion principle. Because the previous studies on contact-free stage adopted the Lorentz force for main force generation mechanism they have suffered from thermal problem deteriorating the precision. Thus, the mag...
Toriumi, M., 1991, 'Positioning Techniques in Semiconductor Manufacturing Equipment,' JSPE, Vol. 57, pp. 24-28
Jin, J. and Higuchi, T., 1997, 'Direct Electrostatic Levitation and Propulsion,' IEEE Trans. Industrial Electronics, Vol. 44, No. 2, pp. 234-239
Jin, J., Yih, C., Higuchi, T. and Jeon, J. D., 1998, 'Direct Electrostatic Levitation and Propulsion of Silicon Wafer,' IEEE Trans Indust. Applications, Vol. 34 No. 5, pp. 975-984
Kim, W. J. and Trumper, D. L., 1998, 'High-Precision Magnetic Levitation Stage for Photolithography,' Precision Eng., Vol. 22, No. 2, pp. 66-77
Sawyer, B. A., Dec. 24. 1974, 'Actuating System,' U.S. Patent 3 857078
Tomita, Y. and Koyanagawa, Y., 1998, 'Study on a Surface Motor Driven Precise Positioning System,' J. Dyn. Syst., Meas. Contr., Vol. 3, No. 2, pp. 113-119
Jung, K. S., Lee, S.H. and Baek, Y. S., 2002, 'Feasibility Study of General Purpose Precision Stage Using a Novel Contact Free Surface Actuator Based on Magnetic Suspension Technology,' Trans. of KSME A, Vol. 267, No. 3, pp. 452-460
Raters, H. C., 1951, Electromagnetic Devices, John Wiley & Sons, Inc
*원문 PDF 파일 및 링크정보가 존재하지 않을 경우 KISTI DDS 시스템에서 제공하는 원문복사서비스를 사용할 수 있습니다.
Copyright KISTI. All Rights Reserved.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.