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NTIS 바로가기Transactions on electrical and electronic materials, v.7 no.4, 2006년, pp.167 - 172
Kim, Hwan-Chul (Composite Materials Center, Korea Institute of Ceramic Eng. & Tech.) , Lim, Hyung-Mi (Composite Materials Center, Korea Institute of Ceramic Eng. & Tech.) , Kim, Dae-Sung (Composite Materials Center, Korea Institute of Ceramic Eng. & Tech.) , Lee, Seung-Ho (Composite Materials Center, Korea Institute of Ceramic Eng. & Tech.)
Submicron colloidal silica coated with ceria were prepared by mixing of silica and nano ceria particles and modified by hydrothermal reaction. The polishing efficiency of the ceria coated silica slurry was tested over oxide film on silicon wafer. By changing the polishing pressure in the range of 주제어
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