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NTIS 바로가기전기전자재료학회논문지 = Journal of the Korean institute of electronic material engineers, v.21 no.9, 2008년, pp.808 - 811
윤덕용 (성균관대학교 정보통신공학부) , 박용섭 (성균관대학교 정보통신공학부) , 최원석 (한밭대학교 전기공학과) , 홍병유 (성균관대학교 정보통신공학부)
Optical and mechanical properties of diamond-like carbon (DLC) films synthesized by RF plasma enhanced chemical vapor deposition were investigated as a function the C/H ratio in gas mixture. The C/H ratio was varied from 6 to 10 %, adjusting the amount of
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S. M. Mominuzzaman, K. M. Krishna, T. Soga, T. Jimbo, and M. Umeno, "Optical absorption and electrical conductivity of amorphous carbon", Jpn. J. Appl. Phys., Vol. 38, p. 658, 1999
P. Yang, N. Huang, Y. X. Leng, J. Y. Chen, R. K. Y. Fu, S. C. H. Kwok, Y. Leng, and P. K. Chu, "Activation of platelets adhered on amorphous hydrogenated carbon (a-C:H) films synthesized by plasma immersion ion implantation-deposition (PIII-D)", Biomaterials, Vol. 24, p. 2821, 2003
Y. S. Park and B. Y. Hong, "Characteristics of hydrogenated amorphous carbon(a-C:H) thin films grown by close field unbalanced magnetron sputtering method", J. of KIEEME (in Korean), Vol. 17, No. 3, p. 278, 2004
M. Noda, T. Shinagawa, S. Kawai, and M. Umeno, "Microstructure and optical band gap control of DLC film deposited by pulsed discharge plasma CVD", Dimaond and Related Materials, Vol. 17, p. 646, 2008
N. I. Klyui, V. G. Litovchenko, A. G. Rozhin, V. N. Dikusha, M. Kittler, and W. Seifert, "Silicon solar cells with antireflection diamond- like carbon and silicon carbide films", Solar Energy Materials & Solar Cells, Vol. 72, p. 597, 2002
J. Q. Xi, Martin F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, "Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection", Nature Photonics, Vol. 1, p. 176, 2007
I. Ay, and H. Tolunay, "Optical transmission measurements on glow-discharge amorphous silicon nitride films", Turk. J. Phy., Vol. 25, p. 215, 2001
J. Zhao and M. A. Green, "Optimized antireflection coatings for high-efficiency silicon solar cells", IEEE Transactions on Electron Devices, Vol. 38, p. 1925, 1991
K. R. Lee and K. Y. Eun, "Diamond-like carbon film", Bull. of the Korean Inst. of Met. & Mater., Vol. 6, No. 4, p. 345, 1993
E. F. Motta and I. Pereyra, "Amorphous hydrogenated carbon-nitride films prepared by RF-PECVD in methane-nitrogen atmospheres", J. of Non-Crystalline Solids, Vol. 338-340, p. 525, 2004.
A. A. Evtukh, V. G. Litovchenko, N. I. Klyui, R. I. Marchenko, and S. Yu. Kudzinovski, "Properties of plasma enhanced chemical vapor deposition diamond-like carbon films as field electron emitters prepared in different regimes", J. Vac. Sci. Technol. B, Vol. 17, No. 2, p. 679, 1999
Y. Lifshitz, G. D. Lempert, E. Grossman, H. J. Scheibe, S. Voellmar, B. Schultrich, A. Breskin, R. Chechik, E. Shefer, D. Bacon, R. Kalish, and A. Hoffman, "Optical and photoemission studies of DLC films prepared with a systematic variation of the $sp^{3}:sp^{2}$ composition", Dia. Relat. Mater., Vol. 6, p. 687, 1997
S. Kaplan, F. Jansen, and M. Machonkin, "Characterization of amorphous carbon- hydrogen films by solid-state nuclear magnetic resonance", Appl. Phys. Lett., Vol. 47, p. 750, 1985
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