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This paper reports an investigation on nanotribological properties of silicon nanochannels coated by a diamond-like carbon (DLC) film. The nanochannels were fabricated on Si (100) wafers by using photolithography and reactive ion etching (RIE) techniques. The channeled surfaces (Si channels) were then further modified by coating thin DLC film. Water contact angle of the modified and unmodified Si surfaces was examined by an anglemeter using the sessile-drop method. Nanotribological properties, namely friction and adhesion forces, of the Si channels coated with DLC (DLC-coated Si channels) were investigated in comparison with those of the flat Si, DLC-coated flat Si (flat DLC), and Si channels, using an atomic force microscope (AFM). Results showed that the DLC-coated Si channels greatly increased hydrophobicity of silicon surfaces. The DLC coating and Si channels themselves individually reduced adhesion and friction forces of the flat Si. Further, the DLC-coated Si channels exhibited the lowest values of these forces, owing to the combined effect of reduced contact area through the channeling and low surface energy of the DLC. This combined modification could prove a promising method for tribological applications at small scales.

참고문헌 (16)

  1. Bhushan, B., Tribology Issues and Opportunities in MEMS, pp. 85, Kluwer Academic Publishers, Dordrecht, Netherlands, 1998 
  2. Kasai, T., Bhushan, B., Kulik, G., Barbieri, L., Hoffmann, P., 'Micro/nanotribological study of perfluorosilane SAMs for antistiction and low wear,' J. Vac. Sci. Technol. B, Vol. 23, pp. 995-1003, 2005 
  3. Robertson, J., 'Diamond-like amorphous carbon,' Materials Science and Engineering, R37, pp. 129-281, 2002 
  4. Bhushan, B., Handbook of Micro/Nano Tribology, 2^{nd} ed., pp.3-80, CRC Press, Boca Raton, 1999 
  5. Beake, B. D., Leggett, G. J., 'Variation of Frictional Forces in Air with the Compositions of Heterogeneous Organic Surfaces,' Langmuir, Vol.16, pp. 735-739, 2000 
  6. Cassie, A. B. D., and Baxter, S., 'Wettability of porous surfaces,' Trans. Faraday. Soc., Vol. 40, pp. 546-551, 1944 
  7. Johnson, K. L., Kendall, K., Roberts, A. D., 'Surface energy and contact of elastic solid,' Proc. Roy. Soc. Lond. A Mater., Vol. 321, pp. 301-313, 1971 
  8. Yoon, E.-S., Singh, R. A., Oh, H. J, Kong, H., 'The effect of contact area on nano/micro-scale friction,' Wear, Vol. 259, pp.1424-1431, 2005 
  9. Wenzel, R. N., 'Resistance of solid surfaces to wetting by water,' Ind. Eng. Chem., Vol. 28, pp. 988-994, 1936 
  10. Pham, D. C., Ahn, H.-S., Oh, J.-E., Yoon, E.-S., 'Tribochemical Interactions of Si-doped DLC Film Against Steel in Sliding Contact,' J. Mech. Sci. Technol., Vol. 21, pp.1083-1089, 2007 
  11. Pham, D. C., Singh, R. A., Yoon, E.-S., 'Dual Surface Modifications of Silicon Surfaces for Tribological Application in MEMS,; KSTLE International Journal, Vol. 8, pp. 26-28, 2007 
  12. Bhushan, B., Springer Handbook of Nanotechnology, pp.983, Springer-Verlag, Berlin, Heidelberg, 2004 
  13. Zhao, Y., Lu, Q., Li, M., Li, Xin.,'Anisotropic Wetting Characteristics on Submicrometer-Scale Periodic Grooved Surface,' Langmuir, Vol. 23, pp. 6212-6217, 2007 
  14. Yoon, E. -S., Singh, R. A., Kong, H., Kim, B., Kim, D. -H., Jeong, H. E., and Suh, K. Y., 'Tribological properties of biomimetic nano-patterned polymeric surfaces on silicon wafer,' Tribology Letters, Vol. 21, pp. 31-37, 2006 
  15. Bowden, F. P., Tabor, D., The friction and Lubrication of Solids, pp. 90-121, Clarenden Press., Oxford, 1950 
  16. Marchetto, D., Rota, A., Calabri, L., Gazzadi, G. C. Menozzi, C., Valeri, S., 'AFM investigation of tribological properties of nano-patterned silicon surface,' Wear , Vol. 265, pp. 577-582, 2008 

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