In micro/nano-scale contacts in MEMS and NEMS, capillary and van der Waals forces generated around contacting micro-asperities significantly influence the performance of concerning device as they are closely related to adhesion and stiction of interacting surfaces. In this regard, it is of prime importance to accurately estimate the magnitude of surface forces so that an optimal solution for reducing friction and adhesion of micro/nano-surfaces may be obtained We introduced an effective method to calculate these surface forces based on topography information obtained from an atomic force microscope. This method was used to calculate surface forces generated in the contact interface formed between diamond-like carbon coating and $Si_3N_4$ ball. This method is shown to effectively demonstrate the influence of capillary force in the contact area, especially in humid atmosphere.
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Lee, Joo Min ; Han, You Ha ; Kwak, Dong Ryul ; Park, Ik Keun 2014. "Analysis of Contact Resonance Frequency Characteristics for Cantilever of Ultrasonic-AFM Using Finite Element Method" 한국생산제조시스템학회지 = Journal of the Korean Society of Manufacturing Technology Engineers, 23(5): 478~484