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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.18 no.4, 2019년, pp.6 - 11
Lee, Haechang (Department of Electronics Engineering, Gachon University) , Zhao, Zhenqian (Department of Electronics Engineering, Gachon University) , Kwon, Sang Jik (Department of Electronics Engineering, Gachon University) , Cho, Eou Sik (Department of Electronics Engineering, Gachon University)
For a wider application of laser direct patterning, selective laser ablation of indium tin oxide (ITO) film on transparent oxide semiconductor (TOS) thin film was carried out using a diode-pumped Q-switched Nd:YVO4 laser at a wavelength of 1064 nm. In case of the laser ablation of ITO on indium gall...
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