[논문]Chemical Use and Associated Health Concerns in the Semiconductor Manufacturing Industry

Yoon, Chungsik; Kim, Sunju; Park, Donguk; Choi, Younsoon; Jo, Jihoon; Lee, Kwonseob

doi:10.1016/j.shaw.2020.04.005

Chemical Use and Associated Health Concerns in the Semiconductor Manufacturing Industry 원문보기

Safety and health at work : SH@W, v.11 no.4, 2020년, pp.500 - 508

Yoon, Chungsik (Department of Environmental Health, School of Public Health, Seoul National University) , Kim, Sunju (Department of Environmental Health, School of Public Health, Seoul National University) , Park, Donguk (Department of Environmental Health, Korea National Open University) , Choi, Younsoon (Management and Planning Bureau, Korea Occupational Safety and Health Agency) , Jo, Jihoon (Occupational Safety and Health Research Institute, Korea Occupational Safety and Health Agency) , Lee, Kwonseob (Occupational Safety and Health Research Institute, Korea Occupational Safety and Health Agency)

Abstract ▼ AI-Helper

Background: Research on the status of many chemicals used in the semiconductor industry is needed. The purpose of this study was to describe the overall status of chemical use in the semiconductor industry in Korea and to examine it from a health perspective. Methods: Data on the status of chemical use and safety data sheets at 11 of 12 major semiconductor workplaces in Korea were collected. The number of chemical products and chemical constituents, quantities of chemicals, and trade secret ingredients used, as well as the health hazards were examined. Results: On average, 210 chemical products and 135 chemical constituents were used at the surveyed workplaces. Among all chemical products, 33% (range: 16-56%) contained at least one trade secret ingredient. Most of the trade secret ingredients were used in the photolithography process. Several carcinogens, including sulfuric acid, chromic acid, ethylene oxide, crystalline silica, potassium dichromate, and formaldehyde were also used. Only 29% (39 of 135) of the chemical constituents had occupational exposure limits, and more than 60% had no National Fire Protection Association health, safety, and reactivity ratings. Based on the aforementioned results, this study revealed the following. First, many chemical products and constituents are being used in the semiconductor industry and many products contained trade secret ingredients. Second, many products contained significant amounts of carcinogenic, mutagenic, and reproductive toxicant materials. Conclusion: We conclude that protecting workers in the semiconductor industry against harm from chemical substances will be difficult, due to widespread use of trade secret ingredients and a lack of hazard information. The findings of the status of chemical use and the health and safety risks in semiconductor industry will contribute to epidemiological studies, safe workplace, and worker health protection.

주제어

참고문헌 (26)

1 Williams R.S. The evolution of technology for electronic materials over the last 50 years J？Occup Med 59 2007 58 62
2 Hwang C.G. Semiconductor memories for IT era Solid-state circuits conference 2002 24 27 Digest of Technical Papers ISSCC 2002 IEEE International 2002
3 Kang S.W. Han J.U. Kim Y.T. Yoon S.B. Semiconductor device having transistor with vertical gate electrode and method of fabricating the same 2011 US Patent US 7936003 B2
4 Arden W. Future semiconductor material requirements and innovations as projected in the ITRS 2005 roadmap Mater Sci Eng B 134 2006 104 108 10.1016/j.mseb.2006.07.004

상세보기
5 LaDou J. Bailar J.C. Cancer and reproductive risks in the semiconductor industry Int J Occup Environ Health 13 2007 376 385 10.1179/oeh.2007.13.4.376 18085051

상세보기
6 LaDou J. Rohm T. The international electronics industry Int J Occup Environ Health 4 1998 1 18 10.1179/oeh.1998.4.1.1 10026464

상세보기
7 Smith T. Sonnenfeld D.A. Pellow D.N. Challenging the chip: labor rights and environmental justice in the global electronics industry 2006 Temple University Press
8 Kim M.H. Kim H. Paek D. The health impacts of semiconductor production: an epidemiologic review Int J Occup Environ Health 20 2014 95 114 10.1179/2049396713Y.0000000050 24999845

상세보기
9 Villard A. Lelah A. Brissaud D. Drawing a chip environmental profile: environmental indicators for the semiconductor industry J？Clean Prod 86 2015 98 109 10.1016/j.jclepro.2014.08.061

상세보기
10 FocusTaiwan NT$560 million awarded in RCA pollution case http://focustaiwan.tw/news/asoc/201504170015.aspx 2015
11 Belanger P.L. Whorton M.D. Milby T.H. HHE report no. HHE-79-66, Signetics Corporation, Sunnyvale, California, interim report. no. 2. National Institute for Occupational Safety and Health, HHE 79-66 1980 1 17
12 Wade R. Williams M. Mitchell T. Wong J. Tuse B. Semiconductor industry study 1981 California Department of Industrial Relations, Division of Occupational Safety and Health, Taskforce on the Electronics Industry San Francisco
13 Bender T.J. Beall C. Cheng H. Herrick R.F. Kahn A.R. Matthews R. Sathiakumar N. Schymura M.J. Stewart J.H. Delzell E. Cancer incidence among semiconductor and electronic storage device workers Occup Environ Med 64 2007 30 36 10.1136/oem.2005.023366 16847035

상세보기
14 Boice J.D. Jr. Marano D.E. Munro H.M. Chadda B.K. Signorello L.B. Tarone R.E. Blot W.J. McLaughlin J.K. Cancer mortality among US workers employed in semiconductor wafer fabrication J？Occup Environ Med 52 2010 1082 1097 10.1097/JOM.0b013e3181f7e520 21063186

상세보기
15 McElvenny D.M. Investigation of cancer incidence and mortality at a Scottish semiconductor manufacturing facility Occup Med 53 2003 419 430 10.1093/occmed/kqg111

상세보기
16 Nichols L. Sorahan T. Cancer incidence and cancer mortality in a cohort of UK semiconductor workers, 1970？2002 Occup Med 55 2005 625 630 10.1093/occmed/kqi156

상세보기
17 Clapp R.W. Mortality among US employees of a large computer manufacturing company: 1969？2001 Environ Health 5 2006 30 10.1186/1476-069X-5-30 17052328

상세보기
18 Darnton A. Wilkinson S. Miller B. MacCalmna L. Galea K. Shafrir A. Cherrie J. McElvenny D. Osman J. A？further study of cancer among the current and former employees of National Semiconductor (UK) Ltd 2010 Health and Safety Executive UK
19 Lee H.E. Kim E.A. Park J. Kang S.K. Cancer mortality and incidence in Korean semiconductor workers Saf Health Work 2 2011 135 147 10.5491/SHAW.2011.2.2.135 22953196

원문보기 상세보기
20 Tenenbaum D.J. Short-circuiting environmental protections? Environ Health Perspect 111 2003 A278 10.1289/ehp.111-a278 12727614

상세보기
21 Yoon C. Much concern but little research on semiconductor occupational health issues J？Korean Med Sci 27 2012 461 464 10.3346/jkms.2012.27.5.461 22563207

상세보기
22 Kim E.A. Lee S. Seo H.K. Jeon K.Y. Park S.W. Epidemiological survey on health status of semiconductor manufacturing workers-focusing on cancer diseases-. Ulsan (Korea) 2019 Occupational Safety and Health Research Institute(OSHRI), Korea Occupational Safety and Health Agency Report No. 2019-OSHRI-271. pp.1？8, 80-150. [in Korean]
23 Kim S. Yoon C. Ham S. Park J. Kwon O. Park D. Choi S. Kim S. Ha K. Kim W. Chemical use in the semiconductor manufacturing industry Int J Occup Environ Health 24 2018 109 118 10.1080/10773525.2018.1519957 30281405

상세보기
24 Environment I.T.R.S. Safety, and health summary http://www.itrs.net/home.html 2015
25 IEEE (Institute of electrical and electronics engineers). International roadmap for devices and systems 2016 2016 Edition, Environment, Safety, and Health white paper
26 Jang M. Yoon C. Park J. Kwon O. Evaluation of hazardous chemicals with material safety data sheet and by-products of a photoresist used in the semiconductor-manufacturing industry Saf Health Work 10 2019 114 121 10.1016/j.shaw.2018.08.001 30949390

원문보기 상세보기

LOADING...

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 논문명, 저널/프로시딩명, 저자 , 발행년, 권, 호, 시작페이지, 끝페이지, 발행기관 관리번호, 논문명, 대등논문명, 저자 , 저널/프로시딩명, 발행기관, 발행년, 발행언어, 권, 호, 시작페이지, 끝페이지, ISBN, ISSN, 주제분야, 키워드, 초록(한글), 초록(영문), 저자(소속기관)
저장형식	Text(ASCII format) Excel format RefWorks Direct Export RIS format (for Reference Manager, ProCite, EndNote), Scholar's Aids, Mendeley
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

연합인증

Chemical Use and Associated Health Concerns in the Semiconductor Manufacturing Industry 원문보기

Abstract ▼ AI-Helper

주제어

참고문헌 (26)

이 논문을 인용한 문헌

연구과제 타임라인

관련 콘텐츠

원문 보기

원문 URL 링크

오픈액세스(OA) 유형

연관된 기능

이 논문과 함께 이용한 콘텐츠

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

선택된 텍스트

연합인증

Chemical Use and Associated Health Concerns in the Semiconductor Manufacturing Industry 원문보기

Abstract ▼ AI-Helper

주제어

참고문헌 (26)

이 논문을 인용한 문헌

연구과제 타임라인

전체(0) 논문(0) 특허(0) 보고서(0)

전체(0) 논문(0) 특허(0) 보고서(0)

관련 콘텐츠

원문 보기

원문 URL 링크

오픈액세스(OA) 유형

연관된 기능

이 논문과 함께 이용한 콘텐츠

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

선택된 텍스트