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NTIS 바로가기Current applied physics : the official journal of the Korean Physical Society, v.5 no.4, 2005년, pp.387 - 391
Ryu, Jeong-Tak (Research Institute of Nano Technologies and Department of Electronic Engineering, Daegu University, 15 Naeri, Jinryang, Kyungsan, Kyungpook 712-714, South Korea) , Honda, Shin-Ichi (Department of Electronic Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan) , Katayama, Mitsuhiro (Department of Electronic Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan) , Oura, Kenjiro (Department of Electronic Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan)
AbstractUsing a RF magnetron sputtering, amorphous carbon (a-C) and N-doped a-C (a-C:N) thin films were fabricated as field electron emitter. These thin films were deposited on Si(001) substrate at several temperatures. The field emission property was improved for a-C thin films grown at higher subs...
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