The key issues in applications to flexible displays are how to protect OLEDs from moisture and how to control the durability and the reliability of the electrode in the bent state. IZO films were successfully deposited on PET substrates under various sputtering conditions, such as sputtering power, working pressure and T-S distance; then, these IZO films were evaluated for mechanical and electrical properties and permeability. Relatively good film properties (mechanical, electrical and permeability) were obtained for the IZO films deposited under sputtering conditions of 70 W, 1.5 Pa and 50 mm. The packed density of the film had a good effect on the mechanical property and the permeability, as well as on the electrical-optical property, but the condition to obtain a high film density leads to the generation of micro-defects, which has a bad effect on the mechanical property and the permeability.
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