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NTIS 바로가기Physical chemistry chemical physics : PCCP, v.16 no.34, 2014년, pp.18501 - 18512
Huang, Liang (Sustainable Energy Laboratory, China University of Geosciences Wuhan) , Han, Bo (Sustainable Energy Laboratory, China University of Geosciences Wuhan) , Han, Bing (Air Products and Chemicals, Inc. (Headquarters)) , Derecskei-Kovacs, Agnes (Air Products and Chemicals, Inc. (Headquarters)) , Xiao, Manchao (Air Products and Chemicals, Inc.) , Lei, Xinjian (Air Products and Chemicals, Inc.) , O'Neill, Mark L. (Air Products and Chemicals, Inc.) , Pearlstein, Ronald M. (Air Products and Chemicals, Inc.) , Chandra, Haripin (Air Products and Chemicals, Inc.) , Cheng, Hansong (Sustainable Energy Laboratory, China University of Geosciences Wuhan)
A detailed reaction mechanism has been proposed for the full ALD cycle of Si3N4 deposition on the β-Si3N4(0001) surface using bis(diethylamino)silane (BDEAS) or bis(tertiarybutylamino)silane (BTBAS) as a Si precursor with NH3 acting as the nitrogen source. Potential energy landscapes were deriv...
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