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Procedia engineering, v.94, 2014년, pp.6 - 13
Ang, Wan Chia (Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 11 Science Park Road, Science Park II, Singapore 117685) , Kropelnicki, Piotr (Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 11 Science Park Road, Science Park II, Singapore 117685) , Tsai, Julius Ming Lin (Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 11 Science Park Road, Science Park II, Singapore 117685) , Leong, Kam Chew (GLOBALFOUNDRIES Singapore Pte Ltd, 60 Woodlands Industrial Park D, Street 2, Singapore 738406) , Tan, Chuan Seng (School of Electrical & Electronics Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798)
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Abstract It is demonstrated for the first time that the Wheatstone bridge structured metal thin film resistive uncooled microbolometer (in short, WB-bolometer) provides promising temperature sensitivity. This paper describes the design, simulation, and characterization of WB-bolometer using titaniu...
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