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NTIS 바로가기Solid-state electronics, v.137, 2017년, pp.123 - 127
Myeong, I. , Son, D. , Kim, H. , Kang, M. , Shin, H.
In this paper, Self-Heating Effect (SHE) according to depth of STI was analyzed and STI thickness optimization was performed in the plate-shaped vertical field effect transistor (VFET). In case of a VFET, the path of leakage current (I-off) is different from that of a lateral FET (LFET). As a result...
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