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Analysis of Self-Heating Effects on vertical FET according to Shallow Trench Isolation

Solid-state electronics, v.137, 2017년, pp.123 - 127  

Myeong, I. ,  Son, D. ,  Kim, H. ,  Kang, M. ,  Shin, H.

Abstract AI-Helper 아이콘AI-Helper

In this paper, Self-Heating Effect (SHE) according to depth of STI was analyzed and STI thickness optimization was performed in the plate-shaped vertical field effect transistor (VFET). In case of a VFET, the path of leakage current (I-off) is different from that of a lateral FET (LFET). As a result...

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참고문헌 (27)

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