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NTIS 바로가기Applied surface science, v.433, 2018년, pp.988 - 993
Wang, Tao (National Key Laboratory of Science and Technology on Micro) , Hu, Mingshan (National Key Laboratory of Science and Technology on Micro) , Yang, Bin (National Key Laboratory of Science and Technology on Micro) , Wang, Xiaolin (National Key Laboratory of Science and Technology on Micro) , Liu, Jingquan (National Key Laboratory of Science and Technology on Micro)
Abstract Porous nC-Si/SiOx photoluminescent nanostructured layer is fabricated by direct, precursor-free microplasma irradiation on Si substrate in air. It is confirmed that the deposited layer has porous and cluster-like structures by scanning electron microscopy (SEM) and profile scanning. Fourie...
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