[논문]Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns

Seo, Yeong-Hyeon; Hwang, Kyungmin; Kim, Hyunwoo; Jeong, Ki-Hun

doi:10.3390/mi10010067

Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns 원문보기

Micromachines, v.10 no.1, 2019년, pp.67 -

Seo, Yeong-Hyeon (Department of Bio and Brain Engineering, KAIST, Daejeon 34141, Korea) , Hwang, Kyungmin (yseo@kaist.ac.kr (Y.-H.S.)) , Kim, Hyunwoo (k.hwang@kaist.ac.kr (K.H.)) , Jeong, Ki-Hun (hkim151@kaist.ac.kr (H.K.))

Abstract ▼ AI-Helper

Scanning MEMS (micro-electro-mechanical system) mirrors are attractive given their potential use in a diverse array of laser scanning display and imaging applications. Here we report on an electrostatic MEMS mirror for high definition and high frame rate (HDHF) Lissajous scanning. The MEMS mirror comprised a low Q-factor inner mirror and frame mirror, which provided two-dimensional scanning at two similar resonant scanning frequencies with high mechanical stability. The low Q inner mirror enabled a broad frequency selection range. The high definition and high frame rate (HDHF) Lissajous scanning of the MEMS mirror was achieved by selecting a set of scanning frequencies near its resonance with a high greatest common divisor (GCD) and a high total lobe number. The MEMS mirror had resonant scanning frequencies at 5402 Hz and 6702 Hz in x and y directions, respectively. The selected pseudo-resonant frequencies of 5450 Hz and 6700 Hz for HDHF scanning provided 50 frames per second with 94% fill factor in 256 × 256 pixels. This Lissajous MEMS mirror could be utilized for assorted HDHF laser scanning imaging and display applications.

주제어

참고문헌 (31)

1. Hofmann U. Janes J. Quenzer H.-J. High-Q MEMS Resonators for Laser Beam Scanning Displays Micromachines 2012 3 509 528 10.3390/mi3020509

상세보기
2. Hofmann U. Senger F. Janes J. Mallas C. Stenchly V. von Wantoch T. Quenzer H.-J. Weiss M. Wafer-level vacuum-packaged two-axis MEMS scanning mirror for pico-projector application Proc. SPIE 2014 8977 89770A 10.1117/12.2038249
3. Hung A.C.L. Lai H.Y.H. Lin T.W. Fu S.G. Lu M.S.C. An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display Sens. Actuators A Phys. 2015 222 122 129 10.1016/j.sna.2014.10.008

상세보기
4. Yalcinkaya A.D. Urey H. Brown D. Montague T. Sprague R. Two-axis electromagnetic microscanner for high resolution displays J. Microelectromech. Syst. 2006 15 786 794 10.1109/JMEMS.2006.879380

상세보기
5. Wang D. Strassle S. Stainsby A. Bai Y. Koppal S. Xie H. A compact 3D lidar based on an electrothermal two-axis MEMS scanner for small UAV Proceedings of the SPIE Defense + Security Orlando, FL, USA 17–19 April 2018 7
6. Zhang X. Koppal S.J. Zhang R. Zhou L. Butler E. Xie H. Wide-angle structured light with a scanning MEMS mirror in liquid Opt. Express 2016 24 3479 3487 10.1364/OE.24.003479 26907006

상세보기
7. Petitgrand S. Yahiaoui R. Danaie K. Bosseboeuf A. Gilles J.P. 3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope Opt. Lasers Eng. 2001 36 77 101 10.1016/S0143-8166(01)00040-9

상세보기
8. Chudnovsky A. Golberg A. Linzon Y. Monitoring complex monosaccharide mixtures derived from macroalgae biomass by combined optical and microelectromechanical techniques Proc. Biochem. 2018 68 136 145 10.1016/j.procbio.2018.01.018

상세보기
9. Seo Y.-H. Hwang K. Jeong K.-H. 1.65 mm diameter forward-viewing confocal endomicroscopic catheter using a flip-chip bonded electrothermal MEMS fiber scanner Opt. Express 2018 26 4780 4785 10.1364/OE.26.004780 29475322

상세보기
10. Hwang K. Seo Y.-H. Jeong K.-H. Microscanners for optical endomicroscopic applications Micro Nano Syst. Lett. 2017 5 1 10.1186/s40486-016-0036-4

상세보기
11. Piyawattanametha W. Ra H. Qiu Z. Friedland S. Liu J.T.C. Loewke K. Kino G.S. Solgaard O. Wang T.D. Mandella M.J. In vivo near-infrared dual-axis confocal microendoscopy in the human lower gastrointestinal tract J. Biomed. Opt. 2012 17 021102 10.1117/1.JBO.17.2.021102 22463020

상세보기
12. Jung W. Tang S. McCormic D.T. Xie T. Ahn Y.-C. Su J. Tomov I.V. Krasieva T.B. Tromberg B.J. Chen Z. Miniaturized probe based on a microelectromechanical system mirror for multiphoton microscopy Opt. Lett. 2008 33 1324 1326 10.1364/OL.33.001324 18552946

상세보기
13. Dickensheets D.L. Kino G.S. Micromachined scanning confocal optical microscope Opt. Lett. 1996 21 764 766 10.1364/OL.21.000764 19876151

상세보기
14. Rivera D.R. Brown C.M. Ouzounov D.G. Pavlova I. Kobat D. Webb W.W. Xu C. Compact and flexible raster scanning multiphoton endoscope capable of imaging unstained tissue Proc. Natl. Acad. Sci. USA 2011 108 17598 17603 10.1073/pnas.1114746108 22006303

상세보기
15. Seo Y.-H. Hwang K. Park H.-C. Jeong K.-H. Electrothermal MEMS fiber scanner for optical endomicroscopy Opt. Express 2016 24 3903 3909 10.1364/OE.24.003903 26907043

상세보기
16. Park H.-C. Seo Y.-H. Jeong K.-H. Lissajous fiber scanning for forward viewing optical endomicroscopy using asymmetric stiffness modulation Opt. Express 2014 22 5818 5825 10.1364/OE.22.005818 24663919

상세보기
17. Holmström S.T.S. Baran U. Urey H. MEMS Laser Scanners: A Review J. Microelectromech. Syst. 2014 23 259 275 10.1109/JMEMS.2013.2295470

상세보기
18. Morrison J. Imboden M. Little T.D. Bishop D. Electrothermally actuated tip-tilt-piston micromirror with integrated varifocal capability Opt. Express 2015 23 9555 9566 10.1364/OE.23.009555 25968784

상세보기
19. Hah D. Patterson P.R. Nguyen H.D. Toshiyoshi H. Wu M.C. Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors IEEE J. Sel. Top. Quantum Electron. 2004 10 505 513 10.1109/JSTQE.2004.829200

상세보기
20. Urey H. Torsional MEMS scanner design for high-resolution display systems Opt. Scanning II Proc. SPIE 2002 4773 27 37 10.1117/12.469198
21. Schenk H. Dürr P. Kunze D. Lakner H. Kück H. A Resonantly excited 2D-micro-scanning-mirror with large deflection Sens. Actuators A Phys. 2001 89 104 111 10.1016/S0924-4247(00)00529-X

상세보기
22. Kim J. Christensen D. Lin L. Monolithic 2-D scanning mirror using self-aligned angular vertical comb drives IEEE Photonics Technol. Lett. 2005 17 2307 2309 10.1109/LPT.2005.857612

상세보기
23. Arslan A. Brown D. Davis W.O. Holmström S. Gokce S.K. Urey H. Comb-actuated resonant torsional microscanner with mechanical amplification J. Microelectromech. Syst. 2010 19 936 943 10.1109/JMEMS.2010.2048095

상세보기
24. Cho A.R. Han A. Ju S. Jeong H. Park J.-H. Kim I. Bu J.-U. Ji C.-H. Electromagnetic biaxial microscanner with mechanical amplification at resonance Opt. Express 2015 23 16792 16802 10.1364/OE.23.016792 26191691

상세보기
25. Urey H. Wine D.W. Osborn T.D. Optical performance requirements for MEMS-scanner-based microdisplays Proc. SPIE 2000 4178 176 185 10.1117/12.396486
26. Hoy C.L. Durr N.J. Ben-Yakar A. Fast-updating and nonrepeating Lissajous image reconstruction method for capturing increased dynamic information Appl. Opt. 2011 50 2376 2382 10.1364/AO.50.002376 21629316

상세보기
27. Hwang K. Seo Y.H. Ahn J. Kim P. Jeong K.H. Frequency selection rule for high definition and high frame rate Lissajous scanning Sci. Rep. 2017 7 1 8 10.1038/s41598-017-13634-3 28127051

상세보기
28. Liu X. Cobb M.J. Chen Y. Kimmey M.B. Li X. Rapid-scanning forward-imaging miniature endoscope for real-time optical coherence tomography Opt. Lett. 2004 29 1763 1765 10.1364/OL.29.001763 15352362

상세보기
29. Park H.-C. Seo Y.-H. Hwang K. Lim J.-K. Yoon S.Z. Jeong K.-H. Micromachined tethered silicon oscillator for an endomicroscopic Lissajous fiber scanner Opt. Lett. 2014 39 6675 6678 10.1364/OL.39.006675 25490650

상세보기
30. Chiu Y.-S.S. Chang K.-S.J. Johnstone R.W. Parameswaran M. Fuse-tethers in MEMS J. Micromech. Microeng. 2006 16 480 10.1088/0960-1317/16/3/002

상세보기
31. Jiunn-Horng L. Sheng-Ta L. Chih-Min Y. Weileun F. Comments on the size effect on the microcantilever quality factor in free air space J. Micromech. Microeng. 2007 17 139

상세보기

LOADING...

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 논문명, 저널/프로시딩명, 저자 , 발행년, 권, 호, 시작페이지, 끝페이지, 발행기관 관리번호, 논문명, 대등논문명, 저자 , 저널/프로시딩명, 발행기관, 발행년, 발행언어, 권, 호, 시작페이지, 끝페이지, ISBN, ISSN, 주제분야, 키워드, 초록(한글), 초록(영문), 저자(소속기관)
저장형식	Text(ASCII format) Excel format RefWorks Direct Export RIS format (for Reference Manager, ProCite, EndNote), Scholar's Aids, Mendeley
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

연합인증

Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns 원문보기

Abstract ▼ AI-Helper

주제어

참고문헌 (31)

이 논문을 인용한 문헌

연구과제 타임라인

관련 콘텐츠

원문 보기

원문 URL 링크

오픈액세스(OA) 유형

연관된 기능

이 논문과 함께 이용한 콘텐츠

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

선택된 텍스트

연합인증

Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns 원문보기

Abstract ▼ AI-Helper

주제어

참고문헌 (31)

이 논문을 인용한 문헌

연구과제 타임라인

전체(0) 논문(0) 특허(0) 보고서(0)

전체(0) 논문(0) 특허(0) 보고서(0)

관련 콘텐츠

원문 보기

원문 URL 링크

오픈액세스(OA) 유형

연관된 기능

이 논문과 함께 이용한 콘텐츠

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

선택된 텍스트