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Improvement of Proton Radiation Hardness Using ALD-Deposited Al2O3 Gate Insulator in GaN-Based MIS-HEMTs

ECS journal of solid state science and technology : jss, v.8 no.12, 2019년, pp.Q245 - Q248  

Chang, Sung-Jae (1RF) ,  Cho, Kyu Jun (1RF) ,  Jung, Hyun-Wook (1RF) ,  Kim, Jeong-Jin (1RF) ,  Jang, Yoo-Jin (1RF) ,  Bae, Sung-Bum (1RF) ,  Kim, Dong-Seok (2Korea Multi-Purpose Accelerator Complex, Korea Atomic Energy Research Institute, Gyeongju 38180, Korea) ,  Bae, Youngho (3Department of IT convergence, Uiduk University, Gyeongju 38004, Korea) ,  Yoon, Hyung Sup (1RF) ,  Ahn, Ho-Kyun ,  Min, Byoung-Gue ,  Kim, Haecheon ,  Lim, Jong-Won ,  Kang, Dong-Min

Abstract AI-Helper 아이콘AI-Helper

The proton radiation hardness has been investigated in GaN-based MIS-HEMTs with various gate insulating systems. Through the pulsed mode measurements and carrier mobility extraction, we have revealed that the Coulomb scattering generated by the trapped charges inside of the gate insulating layer is ...

주제어

참고문헌 (29)

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