In this paper, we studied the properties of small-size disk-type ultrasonic motor using travelling wave for the application to the precise control robotic joint motor and fabricated it. The diameter of the ultrasonic motor fabricated was 13mm. Also, the piezoelectric vibrator was constructed by piezoelectric ceramic and elastic material. The piezoelectric ceramic was composed to PZ-PT-PMN which was shown the high electromechanical stability under high vibration level and stainless steel was used as the elastic material in which configuration was disk-type. To conform the capability of application to robotic motor, we measured the change of rotational speed according to applied voltage and applied frequency. As the results, the small-size disk-type ultrasonic motor was able to fabricate, and the revolution speed was 350 (rpm) when input voltage was 55 (Vrms) and applied frequency 160.4 IkHz] under pre-load.
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