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Article delivery and transport apparatus for evacuated processing equipment 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B23Q-017/18
출원번호 US-0556207 (1975-03-07)
발명자 / 주소
  • Giammanco Rosario P. (Gloucester MA)
출원인 / 주소
  • GCA Corporation (Bedford MA 02)
인용정보 피인용 횟수 : 45  인용 특허 : 0

초록

Equipment for processing workpieces on a continuous basis under vacuum transfers workpieces from a feed compartment to an evacuated processing compartment, and removes processed workpieces to a discharge compartment, with a single reciprocating carriage and with lifters that selectively raise workpi

대표청구항

In apparatus for processing workpieces in a selected vacuum atmosphere, the improvement comprising A. first means forming an aligned arrangement of a set of at least two stations for said processing of workpieces and at least two terminal stations for the transferral of workpieces to and/or from sai

이 특허를 인용한 특허 (45)

  1. Matsumura Yoshio (Shiga JPX) Matsui Hiroshi (Kyoto JPX), Apparatus and a method for carrying wafers.
  2. Canella, Robert L.; Ibarra, Tony T., Apparatus and method using rotational indexing for laser marking IC packages carried in trays.
  3. Preti, Fabrizio, Apparatus for the handling of containers.
  4. Beer, Emanuel; White, John M., Automated substrate processing system.
  5. Nakane Hisashi (Kawasaki JPX) Uehara Akira (Yokohama JPX) Miyazaki Shigekazu (Sagamihara JPX) Kiyota Hiroyuki (Hiratsuka JPX) Hijikata Isamu (Tokyo JPX), Automatic apparatus for continuous treatment of leaf materials with gas plasma.
  6. Lei, Lawrence C.; Mak, Alfred W.; Tzu, Gwo-Chuan; Tepman, Avi; Xi, Ming; Glenn, Walter Benjamin, Clamshell and small volume chamber with fixed substrate support.
  7. Tepman Avi, Consecutive deposition system.
  8. Melgaard Hans L. (Minneapolis MN), Conveyor for a clean room.
  9. Boys Donald R. (Cupertino CA) Graves Walter E. (San Jose CA), Disk or wafer handling and coating system.
  10. Kurita Shinichi ; White John M., In-situ substrate transfer shuttle.
  11. Fourezon, Gilles; Poirson, Jean-Marc, Installation for the vacuum treatment in particular of substrates.
  12. Canella Robert L. ; Ibarra Tony T., Laser marking station with enclosure and method of operation.
  13. Canella,Robert L.; Ibarra,Tony T., Laser marking system for dice carried in trays and method of operation.
  14. Robert L. Canella ; Tony T. Ibarra, Laser marking system for dice carried in trays and method of operation.
  15. Braun ; Hans, Machine for the continuous preparation and packaging of freeze-dried materials.
  16. Gazzarrini Vinicio (Firenze ITX), Method and apparatus for automatically transferring and accumulating groups of flaccid articles.
  17. Giles Brian A. (Honeoye Falls NY) Schwab Frederick J. (Churchville NY), Method and apparatus for cleaning semiconductor wafers.
  18. White John M. ; Blonigan Wendell T. ; Tiner Robin L. ; Kurita Shinichi, Method and apparatus for substrate transfer and processing.
  19. Herbert Mittermaier DE; Georg Brenninger DE; Alois Aigner DE, Method and device for loading a susceptor.
  20. Tandy,William D.; Street,Bret K., Methods for marking a bare semiconductor die including applying a tape having energy-markable properties.
  21. Tandy,William D.; Street,Bret K., Methods for marking a packaged semiconductor die including applying tape and subsequently marking the tape.
  22. Zajac John (San Jose CA) Mirkovich Ninko T. (Novato CA) Rathmann Thomas M. (Rohnert Park CA) Lachenbruch Roger B. (Petaluma CA), Modular article processing machine and method of article handling therein.
  23. White John M. ; Conner Robert B. ; Law Kam S. ; Turner Norman L. ; Lee William T. ; Kurita Shinichi, Modular substrate processing system.
  24. Rosenstein,Michael; Shenderovich,Alex; Schweitzer,Marc O.; Lavitsky,Ilya; Lau,Alvin; Feltsman,Michael, Motorized chamber lid.
  25. Thomas Lauinger DE; Armin Aberle AU; Richard Auer DE; Guido Halbach DE; Manuel Kanne DE; Hanno Paschke DE; Jens Moschner DE, Process and arrangement for continuous treatment of objects.
  26. Muka Richard S., Substrate heating apparatus with cantilevered lifting arm.
  27. Fujiyama Shigemi,JPX ; Nishibata Mikio,JPX ; Sagoh Hirohito,JPX, Substrate transfer apparatus and method of substrate transfer.
  28. White, John M.; Turner, Norman L.; Tiner, Robin L.; Keller, Ernst; Kurita, Shinichi; Blonigan, Wendell T.; Berkstresser, David E., Substrate transfer shuttle.
  29. White, John M.; Turner, Norman L.; Tiner, Robin L.; Keller, Ernst; Kurita, Shinichi; Blonigan, Wendell T.; Berkstresser, David E., Substrate transfer shuttle.
  30. Blonigan Wendell T. ; White John M., Substrate transfer shuttle having a magnetic drive.
  31. Blonigan, Wendell T.; White, John M., Substrate transfer shuttle having a magnetic drive.
  32. Wendell T. Blonigan ; John M. White, Substrate transfer shuttle having a magnetic drive.
  33. Vopat, Robert Brent; Schaller, Jason M.; Weaver, William, System and method for quick-swap of multiple substrates.
  34. Maher Joseph A. ; Vowles E. John ; Napoli Joseph D. ; Zafiropoulo Arthur W. ; Miller Mark W., System for processing substrates.
  35. Krause, Jochen; Hofmann, Michael, Transfer chamber for a vacuum processing apparatus, and a vacuum processing apparatus.
  36. Zhu, Meina, Transferring apparatus.
  37. Brooks Norman B. (391 East St. Carlisle MA 01741) Brooks Frank P. (5 Inverness Rd. Winchester MA 01890), Transport apparatus.
  38. Laviolette, Thomas Brian; Laviolette, Jessica Lynn, Vacuum drying method.
  39. Connell, Michael E.; Jiang, Tongbi, Wafer back side coating to balance stress from passivation layer on front of wafer and be used as die attach adhesive.
  40. Connell,Michael E.; Jiang,Tongbi, Wafer back side coating to balance stress from passivation layer on front of wafer and be used as die attach adhesive.
  41. Garrett, Charles B., Wafer lifting and holding apparatus.
  42. Garrett Charles B. (San Jose CA), Wafer transport system.
  43. Stump Paul O. (Byfield MA) Taylor Calvin G. (Andover MA), Wafer transport system.
  44. Corville Richard E. (Alameda CA), Workpiece accumulating and transporting apparatus.
  45. Garrett Charles B. (San Jose CA), Workpiece lifting and holding apparatus.
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