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A power bus element for use in large scale integrated circuits is described. Each bus element consists, for example, of a chip of silicon having two levels of metallization thereon, one acting as an earth (or ground) return plane and the other providing power voltages. Dependent contacts on the chip

A power bus element for use in large scale integrated circuits is described. Each bus element consists, for example, of a chip of silicon having two levels of metallization thereon, one acting as an earth (or ground) return plane and the other providing power voltages. Dependent contacts on the chip make selective contact with metallization over the surface of the semiconductor wafer on which the chip is mounted. A power distribution line consists of a number of such bus elements linked together.

대표청구항 ▼

A semiconductor integrated circuit device comprising a semiconductor wafer containing a plurality of integrated circuit islands arranged in rows defining therebetween channels, said channels providing pathways for electrical signal interconnections between circuit islands, each circuit island having

A semiconductor integrated circuit device comprising a semiconductor wafer containing a plurality of integrated circuit islands arranged in rows defining therebetween channels, said channels providing pathways for electrical signal interconnections between circuit islands, each circuit island having associated therewith terminals solely for the supply of electrical power thereto, a plurality of conductive power feeding paths formed on the substrate and each extending from one of said terminals to a contact area in one of said channels, and a power bus passing along the channel over said electrical signal interconnections and consisting of at least one power distribution element mounted on the substrate, each distribution element having contacts bonded to selected ones of said contact areas, and each element comprising an earth return conductor and a voltage supply conductor electrically separated from one another by a layer of dielectric material.