초록 ▼

Buffer storage apparatus is disclosed for use with a semiconductor wafer processing system having plurality of processing stations positioned along a conveyor structure and in which allowance must be made for different processing rates at different stations, the buffer storage apparatus including a

Buffer storage apparatus is disclosed for use with a semiconductor wafer processing system having plurality of processing stations positioned along a conveyor structure and in which allowance must be made for different processing rates at different stations, the buffer storage apparatus including a first buffer storage station positioned between a first and a second processing station for temporarily holding wafers received from the first processing station and then conveying them to the second processing station, and a second buffer station positioned between the second processing station and the third processing station and including means for conveying a wafer received from the second processing station to the third processing station or for temporarily holding it.

대표청구항 ▼

In a semiconductor wafer processing system having a plurality of processing stations spaced along a conveyor structure and in which the various processing stations may process wafers at different rates and in which each said processing station provides signals indicating its availability or unavaila

In a semiconductor wafer processing system having a plurality of processing stations spaced along a conveyor structure and in which the various processing stations may process wafers at different rates and in which each said processing station provides signals indicating its availability or unavailability for processing a wafer, buffer storage apparatus cooperating with three such processing stations, said buffer storage apparatus comprising a first buffer storage station positioned along said conveyor structure between a first and a second said processing stations and a second buffer storage station positioned along said conveyor structure between said second processing station and a third processing station, said first buffer storage station comprising first means for receiving and temporarily holding a first wafer group comprising a predetermined number of said wafers received from said first processing station and then supplying wafers from said first wafer group to said second processing station and thence to said second buffer storage station, and means for conveying a wafer received at said first buffer storage station to said first holding means and from said first holding means toward said second processing station; and second means for temporarily holding any additional wafers received from said first processing station during the time that said first receiving and holding means is holding or supplying to said second processing station wafers from said first wafer group; and said second buffer station comprising means for conveying a wafer received from said second processing station through said second buffer station to said third processing station if said third processing station is available for receiving said wafer, and means for receiving and temporarily holding said wafer received from said second processing station if said third processing station is unavailable for receiving said wafer and then subsequently supplying said held wafer to said third processing station when said third processing station is available.