초록 ▼

Method and apparatus for coating a thin film upon a substrate in a vacuum chamber using the sputter deposition technique on both sides of the substrate without rotation of the substrate. The substrate is held between two movable rams and is located between two targets equal to or larger in size than

Method and apparatus for coating a thin film upon a substrate in a vacuum chamber using the sputter deposition technique on both sides of the substrate without rotation of the substrate. The substrate is held between two movable rams and is located between two targets equal to or larger in size than the substrate. The rams supply power and cooling to the substrate. A glow suppression ring circumscribes the periphery of the substrate. The cathodes of the sputtering system can be magnetically enhanced for concentration of the sputtering plasma.

대표청구항 ▼

A sputtering apparatus for coating both sides of a flat substrate comprising: a vacuum chamber; means for evacuating gases from said vacuum chamber; means for inserting a gas capable of supporting a sputtering operation; a plurality of planar cathode/targets, at least two being mounted parallel to e

A sputtering apparatus for coating both sides of a flat substrate comprising: a vacuum chamber; means for evacuating gases from said vacuum chamber; means for inserting a gas capable of supporting a sputtering operation; a plurality of planar cathode/targets, at least two being mounted parallel to each other and each including a centrally located cutout, said cathode/targets including a material of the coating to be sputtered on the substrate on at least the facing surface; a pair of ram means for insertion through the cutout of both parallel cathode/targets for slidable movement therewith, one end of each of said rams lying between the parallel cathode/targets and forming a hub to contact and support the substrate therebetween; means around the periphery of the substrate for suppressing plasma glow; magnetic means for enhancing the sputtering about both parallel cathode/targets; means connected to both of said rams for controlling the temperature of the substrate; and means connected to at least one of said rams for applying an electrical potential for biasing the substrate; said rams formed of an electrically conductive material and including means for transmitting said temperature controlling means to the substrate.