초록 ▼

Apparatus for batch coating of substrates under vacuum including a vacuum chamber with a coating system and a plurality of lock chambers with substrate holders which can be introduced into the vacuum chamber. At least two lock chambers with substrate holders are positioned on a common axis on opposi

Apparatus for batch coating of substrates under vacuum including a vacuum chamber with a coating system and a plurality of lock chambers with substrate holders which can be introduced into the vacuum chamber. At least two lock chambers with substrate holders are positioned on a common axis on opposite sides of the vacuum chamber. Each lock chamber is provided on the side facing the vacuum chamber with a lock valve. The vacuum chamber is likewise provided with lock valves on the sides facing the lock chambers whereby the lock chambers can be coupled selectively with the vacuum chamber through the individual lock valves.

대표청구항 ▼

Apparatus for the batch-wise coating of substrates under vacuum comprising vacuum chamber means with a coating system and a plurality of lock chamber means with substrate holder means which can be introduced into the vacuum chamber means, at least two lock chamber means with substrate holder means b

Apparatus for the batch-wise coating of substrates under vacuum comprising vacuum chamber means with a coating system and a plurality of lock chamber means with substrate holder means which can be introduced into the vacuum chamber means, at least two lock chamber means with substrate holder means being positioned on common chassis means on opposite sides of the vacuum chamber means, means for movably mounting the common chassis means to align each lock chamber means with the vacuum chamber means, each lock chamber means being provided on the side facing the vacuum chamber means with lock valve means, said vacuum chamber means being likewise provided with lock valve means on the sides facing the lock chamber means whereby the lock chamber means can be coupled selectively with the vacuum chamber means through the individual lock valve means.