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Piezoelectric wafer mover

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-041/10
출원번호 US-0958273 (1978-11-06)
발명자 / 주소
  • Thaxter James B. (Townsend MA)
출원인 / 주소
  • Sperry Corporation (New York NY 02)
인용정보 피인용 횟수 : 38  인용 특허 : 1

초록

Apparatus for effecting movement, translation and rotation, of an object relative to a reference, is disclosed, comprising transducer means having a portion thereof fixed with respect to the reference and means frictionally coupling the transducer to the object for effecting movement thereof. In add

대표청구항

Apparatus for effecting movement of an object relative to a reference comprising: transducer means having a portion thereof fixed with respect to the reference; means frictionally coupling said transducer means to said object; and means for applying a potential difference to said transducer means to

이 특허에 인용된 특허 (1)

  1. Vishnevsky Vladimir Sergeevich (ULITSA Ovruchskaya ; 19 ; kv. 1 Kiev SU) Kavertsev Vladimir Leonidovich (PROSPEKT Voroshilova ; 17a ; kv. 24 Kiev SU) Kartashev Igor Alexandrovich (PEREULOK Ivana Mary, Piezoelectric motor structures.

이 특허를 인용한 특허 (38)

  1. Miyano Masaaki,JPX ; Kawasaki Toyotoshi,JPX ; Kuwana Minoru,JPX ; Miyazawa Masayuki,JPX ; Ueyama Masayuki,JPX ; Tasaka Yoshihiro,JPX, Apparatus for detecting and displaying position of a lens on an optical axis.
  2. Higuchi Toshiro (Yokohama JPX) Watanabe Masahiro (Tokyo JPX), Apparatus for effecting fine movement by impact force produced by piezoelectric or electrostrictive element.
  3. Tominaga Takayuki (Kariya JPX) Senda Kouji (Oobu JPX) Idogaki Takaharu (Okazaki JPX) Kaneko Takashi (Nagoya JPX) Kanayama Hitoshi (Nagoya JPX), Articulation device.
  4. Zumeris Jona (Nesher ILX), Ceramic motor.
  5. Zumeris Jona,ILX, Ceramic motor.
  6. Zumeris Jona,ILX, Ceramic motor.
  7. Leibovich Vladimir E. (San Jose CA) Novak W. Thomas (San Jose CA), Coarse and fine motion positioning mechanism.
  8. Kosaka Akira,JPX ; Kanbara Tetsuro,JPX ; Shinke Satoshi,JPX, Drive device using electromechanical conversion element.
  9. Shinke Satoshi,JPX ; Okamoto Yasuhiro,JPX ; Yoshida Ryuichi,JPX ; Nakano Haruyuki,JPX ; Fujita Junji,JPX ; Sugimoto Yoshitaka,JPX, Drive device using electromechanical transducer.
  10. Nakano Haruyuki,JPX ; Shinke Satoshi,JPX ; Yoshida Ryuichi,JPX ; Okamoto Yasuhiro,JPX, Drive device using electromechanical transducer and an apparatus employing the drive device.
  11. Mizumoto Kenji,JPX, Drive pulse generating apparatus for drive device using electromechanical transducer.
  12. Yoshida Ryuichi,JPX ; Okamoto Yasuhiro,JPX ; Kuwana Minoru,JPX, Driving apparatus using transducer.
  13. Iwata Koji (Nagoya JPX) Okuma Shigeru (Nagoya JPX) Kimura Yoshimasa (Yokohama JPX) Konata Yoshihiro (Tokyo JPX) Kaneko Kiyoshi (Yokohama JPX), Driving device having a vibrator.
  14. Yoshida Ryuichi,JPX ; Okamoto Yasuhiro,JPX, Driving mechanism.
  15. Kleinschmidt Peter (Munich DEX) Gpfert Max (Munich DEX), Electrically actuated piezoelectric control element.
  16. Mattsson,Christer; Bexell,Mats; Johansson,Stefan; Johansson,Olov; Eriksson,Jonas; Lindmark,S철lve, Electromechanical motor and assembling method therefore.
  17. Polla Dennis L. (Plymouth MN) Costin John A. (Lorian OH) Erdman Arthur G. (Plymouth MN) Peichel David J. (Plymouth MN), Foldable lens delivery system.
  18. Polla Dennis L. ; Costin John A. ; Erdman Arthur G. ; Peichel David J., Foldable lens delivery system.
  19. Polla, Dennis L.; Costin, John A.; Erdman, Arthur G.; Peichel, David J., Foldable lens delivery system.
  20. Karrai Khaled,DEX, Inertial positioner.
  21. Karrai, Khaled; Haines, Miles, Inertial rotation device.
  22. Besocke Karl-Heinz (Julich DEX), Kinematic arrangement for the micro-movements of objects.
  23. Ueyama Masayuki (Takarazuka JPX) Kuwana Minoru (Osaka JPX) Nagata Hideki (Sakai JPX), Lens barrel having a piezoelectric actuator for moving optical elements.
  24. Suzuki Shinichi (Izumiootsu JPX) Kanbara Tetsuro (Sakai JPX) Kuwana Minoru (Osaka JPX) Hagimori Hitoshi (Nara-Ken JPX) Hashimura Junji (Sakai JPX), Lens drive mechanism using an electro-mechanical transducer.
  25. Miyano Masaaki (Sakai JPX) Kawasaki Toyotoshi (Kawachinagano JPX) Kuwana Minoru (Osaka JPX) Miyazawa Masayuki (Kawachinagano JPX) Ueyama Masayuki (Takarazuka JPX) Tasaka Yoshihiro (Toyonaka JPX), Lens moving apparatus.
  26. Miyazawa Masayuki,JPX ; Okamoto Yasuhiro,JPX ; Kurosawa Minoru,JPX, Linear drive mechanism using electromechanical conversion element.
  27. Okada Hiroyuki,JPX, Linear drive mechanism using electromechanical conversion element.
  28. Henderson, David A., Linear drive systems and methods thereof.
  29. Kleinschmidt Peter (Munich DEX), Method for pulse triggering of a piezo-electric sound-transmitting transducer.
  30. Olin, H?kan; Althoff, Fredik; Svensson, Krister, Micropositioning device.
  31. Polla Dennis L. (Brooklyn Park MN) Peichel David J. (Roseville MN) Erdman Arthur G. (New Brighton MN) Costin John A. (Vermilion OH), Miniature linear motion actuator.
  32. Binnig Gerd (Richterswil CHX) Nievergelt Hermann (Adliswil CHX) Rohrer Heinrich (Richterswil CHX) Weibel Edmund (Adliswil CHX), Piezo-electric travelling support.
  33. Culp Gordon W. (Van Nuys CA), Piezoelectric actuator.
  34. Hiroyuki Okada JP, Piezoelectric actuator.
  35. Kaji Takatoshi (Ohbu JPX), Piezoelectric linear actuator.
  36. Yamaguchi Masaki (Gifu JPX), Piezoelectric transducer.
  37. Suh, Hwan-soo, Slip-stick piezoelectric actuator.
  38. Henderson, David A.; Xu, Qin; Piazza, Daniele, Stick-slip stage device and methods of use thereof.
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