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Visible and infrared polarization ratio spectroreflectometer 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01N-021/40
  • G01J-004/00
출원번호 US-0929087 (1978-07-28)
발명자 / 주소
  • Batten Carmen E. (Newport News VA)
출원인 / 주소
  • The United States of America as represented by the Administrator of the National Aeronautics and Space Administration (Washington DC 06)
인용정보 피인용 횟수 : 42  인용 특허 : 1

초록

The instrument disclosed assists in determining the refractive index and absorption index, at different spectral frequencies, of a solid sample by illuminating the sample at various angles in incidence and measuring the corresponding reflected intensities at various spectral frequencies and polariza

대표청구항

An instrument for measuring the intensity of polarized light reflected from a surface, the combination comprising: (a) a sample surface; (b) a reference surface; (c) multiple light sources; (d) light selection and chopping means for selecting the light from one of said multiple light sources, choppi

이 특허에 인용된 특허 (1)

  1. Smith Tennyson (Thousand Oaks CA), Method for mapping surfaces with respect to ellipsometric parameters.

이 특허를 인용한 특허 (42)

  1. Amary,Pascal; Benferhat,Ramdane; Bos,Francis; Cattelan,Denis, Achromatic spectroscopic ellipsometer with high spatial resolution.
  2. Mansuripur Masud (Newton Highlands MA) Ruane Michael (Brookline MA) Rosenvold Robert (Brighton MA), Apparatus for measuring reflectivity.
  3. Johs, Blaine D.; Pfeiffer, Galen L.; Hale, Jeffrey S.; Goeden, Christopher A.; Guenther, Brian D.; Liphardt, Martin M.; He, Ping, Beam chromatic shifting and directing means.
  4. Liphardt,Martin M.; Johs,Blaine D.; Hale,Jeffrey S.; Herzinger,Craig M.; Green,Steven E.; He,Ping; Woollam,John A., Broadband ellipsometer or polarimeter system including at least one multiple element lens.
  5. Rovira, Pablo I.; Zhuang, Guorong Vera; Heaton, John D., Combination of normal and oblique incidence polarimetry for the characterization of gratings.
  6. Liphardt,Martin M.; Johs,Blaine D.; Woollam,John A.; Meyer,Duane E.; Welch,James D., Control of beam spot size in ellipsometer and the like systems.
  7. Johs,Blaine D.; He,Ping; Pfeiffer,Galen L.; Green,Steven E.; Goeden,Christopher A.; Liphardt,Martin M., Control of uncertain angle of incidence of beam from Arc lamp.
  8. Stoughton, Philip Howard; Dietsch, Benjamin Allen; Durchholz, Anthony John; Eckert, Michael Charles, Dampers for fan spinners of aircraft engines.
  9. Johs,Blaine D.; Herzinger,Craig M.; Green,Steven E.; Hale,Jeffrey S., Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibration.
  10. Faville, Andrew; Feltman, Michael S., Ellipsometer apparatus having measurement compensation.
  11. Bjrk Nils A. N. (Tby SEX) Sandstrm Erland T. (Mlndal SEX) Stenberg Johan E. (Gteborg SEX) Stiblert Lars B. (Gteborg SEX), Ellipsometric method and apparatus.
  12. Piwonka-Corle Timothy R. (Portland OR) Scoffone Karen F. (Redwood City CA) Chen Xing (San Jose CA) Lacomb ; Jr. Lloyd J. (Santa Clara CA) Stehle Jean-Louis (Colombes FRX) Zahorski Dorian (Vanves FRX), Focused beam spectroscopic ellipsometry method and system.
  13. Piwonka-Corle Timothy R. ; Chen Xing ; Lacomb ; Jr. Lloyd J. ; Stehle Jean-Louis,FRX ; Zahorski Dorian,FRX, Focused beam spectroscopic ellipsometry method and system.
  14. Piwonka-Corle, Timothy R.; Scoffone, Karen F.; Chen, Xing; Lacomb, Jr., Lloyd J.; Stehle, Jean-Louis; Zahorski, Dorian; Rey, John-Pierre, Focused beam spectroscopic ellipsometry method and system.
  15. Fanton Jeffrey T. (Los Altos CA) Opsal Jon (Livermore CA), Integrated spectroscopic ellipsometer.
  16. Elton, Nick; Day, John, Measuring a surface characteristic.
  17. Canino Lawrence S. (4815 Milne Dr. Torrance CA 90505), Method and apparatus for measuring properties of thin materials using polarized light.
  18. Chernin Semen M. (Vernadskogo ; 58 ; kv. 49 Moscow SUX) Barskaya Evgenia G. (Kirillovskaya ; 4 ; kv. 13 Leningrad SUX) Semenova Galina P. (S. Kovalevskoi ; 18 ; kv. 59 Leningrad SUX), Multiple pass optical system.
  19. Herzinger, Craig M.; Green, Steven E.; Johs, Blaine D., Odd bounce image rotation system in ellipsometer systems.
  20. Johs,Blaine D.; Liphardt,Martin M.; Hale,Jeffrey S.; Herzinger,Craig M.; Green,Steven E.; He,Ping; Woollam,John A., Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses.
  21. Rosencwaig Allan (Danville CA) Willenborg David L. (Dublin CA), Sample characteristic analysis utilizing multi wavelength and multi angle polarization and magnitude change detection.
  22. Green,Steven E.; He,Ping; Pfeiffer,Galen L.; Guenther,Brian D.; Cooney,Gerald T.; Woollam,John A.; Liphardt,Martin M.; Johs,Blaine D.; Herzinger,Craig M., Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems.
  23. Liphardt,Martin M., Sample orientation system and method.
  24. McCandless,James A., Self-referencing instrument and method thereof for measuring electromagnetic properties.
  25. Eisen, Juergen; Zwerger, Lars, Sensor for capturing a moving material web.
  26. Woollam,John A.; Green,Steven E.; He,Ping; Johs,Blaine D.; Herzinger,Craig M.; Pfeiffer,Galen L.; Guenther,Brian D.; Liphardt,Martin M., Spectrophotometer, ellipsometer, polarimeter and the like systems.
  27. Woollam,John A.; Green,Steven E.; He,Ping; Johs,Blaine D.; Herzinger,Craig M.; Pfeiffer,Galen L.; Guenther,Brian D.; Liphardt,Martin M.; Cooney,Gerald T., Spectrophotometer, ellipsometer, polarimeter and the like systems.
  28. Goldstein, Dennis H.; Chenault, David B.; Owens, Monte, Spectroplarimetric reflectometer.
  29. Horie,Masahiro, Spectroscopic ellipsometer.
  30. Le Bris Jean (Quincy Sous Senart FRX) Erman Marko (Paris FRX), Spectroscopic ellipsometer.
  31. Herzinger, Craig M, System and method for compensating detector non-idealities.
  32. Liphardt, Martin M.; He, Ping; Welch, James D., System and method of applying horizontally oriented arc-lamps in ellipsometer or the like systems.
  33. Liphardt, Martin M., Temperature controlled lens.
  34. Herzinger, Craig M., Terahertz ellipsometer system, and method of use.
  35. Herzinger, Craig M., Terahertz ellipsometer system, and method of use.
  36. Herzinger, Craig M.; Schubert, Mathias M.; Hofmann, Tino; Liphardt, Martin M.; Woollam, John A., Terahertz-infrared ellipsometer system, and method of use.
  37. Herzinger, Craig M.; Schubert, Mathias M.; Hofmann, Tino; Liphardt, Martin M.; Woollam, John A., Terahertz-infrared ellipsometer system, and method of use.
  38. Herzinger, Craig M.; Schubert, Mathias M.; Hofmann, Tino; Liphardt, Martin M.; Woollam, John A., Terahertz-infrared ellipsometer system, and method of use.
  39. Herzinger, Craig M.; Schubert, Mathias M.; Hofmann, Tino; Liphardt, Martin M.; Woollam, John A., Terahertz-infrared ellipsometer system, and method of use.
  40. Herzinger, Craig M.; Schubert, Mathias M.; Hofmann, Tino; Liphardt, Martin M.; Woollam, John A., Terahertz-infrared ellipsometer system, and method of use.
  41. Herzinger, Craig M.; Schubert, Matias M.; Hofmann, Tino; Liphardt, Martin M.; Woollam, John A., Terahertz-infrared ellipsometer system, and method of use.
  42. Niikura Hiroshi,JPX, Unit for measuring optical properties.
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