초록 ▼

A system for generating and delivering vapors to a vapor deposition station is disclosed which comprises a bubbler 10 adapted to contain a supply of liquid, a bubbler heater 14 thermally coupled with the bubbler and electrically coupled with a heater controller, a temperature controlled chamber 23 l

A system for generating and delivering vapors to a vapor deposition station is disclosed which comprises a bubbler 10 adapted to contain a supply of liquid, a bubbler heater 14 thermally coupled with the bubbler and electrically coupled with a heater controller, a temperature controlled chamber 23 located above the bubbler, and means 58,59 for heating the space within the temperature controlled chamber. A carrier gas intake conduit 27,28 extends through the temperature controlled chamber and down into the bubbler through which carrier gas may be introduced into the bubbler. A vapor exhaust conduit 41,49 extends upwardly from the bubbler and through the temperature controlled chamber through which vapors may be carried from the bubbler entrained with the carrier gas to the vapor deposition station. A sensor 52 is positioned within that portion of the vapor exhaust conduit located within the temperature controlled chamber and operatively coupled with the bubbler heater controller.

대표청구항 ▼

A system for generating and delivering vapors to a vapor deposition station comprising, in combination, a vaporizer adapted to contain a supply of liquid; a vaporizer heater thermally coupled with said vaporizer and electrically coupled with a heater controller; a temperature controlled chamber loca

A system for generating and delivering vapors to a vapor deposition station comprising, in combination, a vaporizer adapted to contain a supply of liquid; a vaporizer heater thermally coupled with said vaporizer and electrically coupled with a heater controller; a temperature controlled chamber located above said vaporizer; means for heating the space within said temperature controlled chamber; a carrier gas intake conduit extending through said temperature controlled chamber and down into said vaporizer through which a carrier gas may be introduced into said vaporizer; a vapor exhaust conduit extending upwardly from said vaporizer and through said temperature controlled chamber through which vapors may be carried from said vaporizer entrained with the carrier gas to the vapor deposition station; and a vapor sensor positioned within that portion of said vapor exhaust conduit located within said temperature controlled chamber and operatively coupled with said vaporizer heater controller.