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Media compatible pressure transducer

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01L-009/06
출원번호 US-0065886 (1979-08-13)
발명자 / 주소
  • Kurtz Anthony D. (Englewood NJ) Mallon Joseph R. (Franklin Lakes NJ)
출원인 / 주소
  • Kulite Semiconductor Products, Inc. (Ridgefield NJ 02)
인용정보 피인용 횟수 : 110  인용 특허 : 3

초록

There is disclosed an absolute pressure transducer which is adaptable for use in various deleterious mediums. A single wafer contains a gage sensor configuration on one portion and an absolute sensor configuration on another adjacent portion. An active diaphragm area is defined for each sensor confi

대표청구항

An absolute pressure transducer, comprising: (a) a wafer of a semiconductor material having a top and bottom surface with relatively thin side surfaces, said bottom surface having first and second circular recesses adjacent one another and relatively of the same diameter manifesting a first and seco

이 특허에 인용된 특허 (3)

  1. Hynecek Jaroslav (Bedford OH) Ko Wen H. (Cleveland Heights OH) Yon Eugene T. (Lyndhurst OH), Miniature pressure transducer for medical use and assembly method.
  2. Reddy ; Junuthula N., Multiple function pressure sensor.
  3. Aine Harry E. (1804 Stierlin Road Mountain View CA 94040), Solid state pressure transducer of the leaf spring type and batch method of making same.

이 특허를 인용한 특허 (110)

  1. Crivelli, Rocco, Apparatus and method for minimizing drift of a piezo-resistive pressure sensor due to the progressive release of mechanical stress over time.
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  3. Minervini, Anthony D., Bottom port multi-part surface mount silicon condenser microphone package.
  4. Minervini, Anthony D., Bottom port surface mount MEMS microphone.
  5. Minervini, Anthony D., Bottom port surface mount MEMS microphone.
  6. Minervini, Anthony D., Bottom port surface mount silicon condenser microphone package.
  7. Minervini, Anthony D., Bottom port surface mount silicon condenser microphone package.
  8. Frick, Roger L.; Willcox, Charles R., Capacitive pressure sensing with moving dielectric.
  9. Lee, Steven, Capacitive pressure sensor with vertical electrical feedthroughs and method to make the same.
  10. Gravel James L. ; Johnson Bruce L. ; Romo Mark, Carrier assembly for fluid sensor.
  11. Kurtz,Anthony D.; Ned,Alexander A., Combined absolute differential transducer.
  12. Kurtz, Anthony D., Combined wet-wet differential and gage transducer employing a common housing.
  13. Kurtz, Anthony D.; Kurtz, legal representative, Nora, Combined wet-wet differential and gage transducer employing a common housing.
  14. Kurtz, Anthony D.; Geras, Elias, Combustion transducer apparatus employing pressure restriction means.
  15. Kurtz, Anthony D., Compact absolute and gage pressure transducer having a mounting apparatus for accurately positioning and aligning a leadless semiconductor chip on an associated header.
  16. Bohrer, Philip J.; Higashi, Robert E.; Johnson, Timothy L.; Satren, Ernest A., Condition responsive sensor for fluid flow measurement.
  17. Kurtz, Anthony D., Dielectrically isolated plastic pressure transducer.
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  19. Shimada Satoshi (Hitachi JPX) Shimizu Yasushi (Katsuta JPX) Ugai Seiichi (Hitachi JPX), Differential pressure transmitter.
  20. Kurtz, Anthony D.; Ned, Alexander; Stefanescu, Sorin; Kurtz, Nora, Differential temperature and acceleration compensated pressure transducer.
  21. Kuznia,Philip D.; Vas,Timothy A.; Delrymple,Derek A., Dual pressure sensor apparatus.
  22. Fahimi, Saeed; Eriksen, Odd H.; Little, Charles, Duplex pressure transducers.
  23. Fahimi, Saeed; Eriksen, Odd H.; Little, Charles, Duplex pressure transducers.
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  27. Szczech, John B.; Van Kessel, Peter, Embedded dielectric as a barrier in an acoustic device and method of manufacture.
  28. Kurtz, Anthony D.; Kochman, Boaz; Hurst, Adam; Shang, Tonghuo, Enhanced static-dynamic pressure transducer suitable for use in gas turbines and other compressor applications.
  29. Kurtz, Anthony D.; Kurtz, legal representative, Nora; Kochman, Boaz; Hurst, Adam; Shang, Tonghuo, Enhanced static-dynamic pressure transducer suitable for use in gas turbines and other compressor applications.
  30. Kurtz Anthony D. (Teaneck NJ) Mallon Joseph R. (Franklin Lakes NJ), Environmentally protected pressure transducers employing two electrically interconnected transducer arrays.
  31. Bubel William L., Force sensing apparatus.
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  34. Clifford, Mark J., Independent-excitation cross-coupled differential-pressure transducer.
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  36. Singh Gurnam (Riverside CA), Integral differential and static pressure transducer.
  37. Bohrer, Philip J.; Higashi, Robert E.; Johnson, Robert G., Integral flow sensor and channel assembly.
  38. Krechmery Roger L. (Riverside CA), Integrated dual-range pressure transducer.
  39. Wagner, David E.; Hoffman, James H.; Lopopolo, Gerald, Isolation technique for pressure sensing structure.
  40. Wagner, David E.; Hoffman, James H.; Lopopolo, Gerald, Isolation technique for pressure sensing structure.
  41. Shimazoe Michitaka (Mito JPX) Matsuoka Yoshitaka (Mito JPX), Load cell.
  42. Kurtz, Anthony D., Low differential pressure transducer.
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  45. Pahl, Wolfgang, MEMS microphone, production method and method for installing.
  46. Leidl, Anton; Krueger, Hans; Stelzl, Alois; Pahl, Wolfgang; Seitz, Stefan, MEMS package and method for the production thereof.
  47. Pahl, Wolfgang; Leidl, Anton; Seitz, Stefan; Krueger, Hans; Stelzl, Alois, MEMS package and method for the production thereof.
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  49. Bang Christopher A. ; Just Marcus S. ; Yang Xiaofeng ; Nagy Michael L., Media compatible pressure sensor.
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  53. Kurtz, Anthony D., Method and apparatus for the determination of absolute pressure and differential pressure therefrom.
  54. Pahl, Wolfgang, Method for applying a structured coating to a component.
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  56. Minervini, Anthony D., Methods of manufacture of bottom port multi-part surface mount silicon condenser microphone packages.
  57. Minervini, Anthony D., Methods of manufacture of bottom port surface mount MEMS microphones.
  58. Minervini, Anthony D., Methods of manufacture of bottom port surface mount MEMS microphones.
  59. Minervini, Anthony D., Methods of manufacture of bottom port surface mount silicon condenser microphone packages.
  60. Minervini, Anthony D., Methods of manufacture of bottom port surface mount silicon condenser microphone packages.
  61. Minervini, Anthony D., Methods of manufacture of top port multi-part surface mount MEMS microphones.
  62. Minervini, Anthony D., Methods of manufacture of top port multi-part surface mount silicon condenser microphone packages.
  63. Minervini, Anthony D., Methods of manufacture of top port multi-part surface mount silicon condenser microphones.
  64. Minervini, Anthony D., Methods of manufacture of top port multipart surface mount silicon condenser microphone package.
  65. Minervini, Anthony D., Methods of manufacture of top port surface mount MEMS microphones.
  66. Minervini, Anthony D., Methods of manufacture of top port surface mount MEMS microphones.
  67. Minervini, Anthony D., Methods of manufacture of top port surface mount silicon condenser microphone packages.
  68. Minervini, Anthony D., Methods of manufacture of top port surface mount silicon condenser microphone packages.
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  72. Hagen Floyd W. (Eden Prairie MN) Hohenstein Gregg A. (Bloomington MN) Severson John A. (Eagan MN) Trongard Pennelle J. (Savage MN), Multifunctional air data sensing probes.
  73. Bentley, Ian; Ricks, Lamar Floyd, Packaged sensor with multiple sensors elements.
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  75. Ishibashi Kiyoshi (Itami JPX), Pressure sensor.
  76. Sittler, Fred C.; Nord, Christina A.; Romo, Mark G., Pressure sensor assembly.
  77. Sittler, Fred C., Pressure sensor capsule with improved isolation.
  78. Frick Roger L. ; Louwagie Bennett L. ; Toy Adrian C., Pressure sensor cavity etched with hot POCL.sub.3 gas.
  79. Fred C. Sittler ; Roger Frick, Pressure sensor for a pressure transmitter.
  80. Shimada Satoshi (Hitachi JPX) Murayama Ken (Hitachi JPX) Kobori Shigeyuki (Hitachi JPX) Kawakami Kanji (Mito JPX), Pressure sensor with improved semiconductor diaphragm.
  81. Knecht Thomas A. (Minnetonka MN), Pressure transducer.
  82. Silverwater Bernard F. (Plainview NY), Pressure transducer assembly.
  83. Kurtz,Anthony D., Pressure transducer for measuring low dynamic pressures in the presence of high static pressures.
  84. Sweeney ; Jr. John Worth, Saturometer.
  85. Tada Yasuo (Himeji JPX), Semiconductor pressure sensor.
  86. Yamagami Kozo (Hyogo JPX), Semiconductor pressure sensor.
  87. Suzuki Seikou (Hitachiota JPX) Nishihara Motohisa (Katsuta JPX) Kawakami Kanji (Katsuta JPX) Sato Hideo (Hitachi JPX) Kobori Shigeyuki (Hitachi JPX) Hachino Hiroaki (Hitachi JPX) Takahashi Minoru (Ka, Semiconductor pressure sensor having plural pressure sensitive diaphragms and method.
  88. Klopf, Frank; Stoetzler, Arno; Kober, Juergen, Sensor assemblage and method for manufacturing a sensor assemblage.
  89. Dangtran, John; Horton, Roger, Sensor device packaging.
  90. Kurtz, Anthony D., Sensor for measuring low dynamic pressures in the presence of high static pressures.
  91. Gravel, James L.; Sittler, Fred C.; Broden, David A., Sensor with fluid isolation barrier.
  92. Minervini, Anthony D., Silicon condenser microphone and manufacturing method.
  93. Knecht Thomas A. (Chanhassen MN) Romo Mark G. (Eden Prairie MN), Silicon side by side coplanar pressure sensors.
  94. Frick Roger L. ; Louwagie Bennett L. ; Toy Adrian C., Sintered pressure sensor for a pressure transmitter.
  95. Clifford, Mark J., Stable differential pressure measuring system.
  96. Hagen Floyd W. (Eden Prairie MN), Three pressure pseudo -D 상세보기
  • Minervini, Anthony D., Top port multi-part surface mount MEMS microphone.
  • Minervini, Anthony D., Top port multi-part surface mount silicon condenser microphone.
  • Minervini, Anthony D., Top port multi-part surface mount silicon condenser microphone.
  • Minervini, Anthony D., Top port multi-part surface mount silicon condenser microphone.
  • Minervini, Anthony D., Top port multi-part surface mount silicon condenser microphone package.
  • Minervini, Anthony D., Top port multi-part surface mount silicon condenser microphone package.
  • Minervini, Anthony D., Top port surface mount MEMS microphone.
  • Minervini, Anthony D., Top port surface mount MEMS microphone.
  • Minervini, Anthony D., Top port surface mount silicon condenser microphone package.
  • Minervini, Anthony D., Top port surface mount silicon condenser microphone package.
  • Sweeney ; Jr. John W., Total dissolved gas pressure sensor, replaceable collector module and process.
  • Sooriakumar K. (Scottsdale AZ) Monk David J. (Mesa AZ) Chan Wendy K. (Scottsdale AZ) Goldman Kenneth G. (Chandler AZ), Vertically integrated sensor structure and method.
  • Kurtz Anthony D., Vibration compensated pressure sensing assembly.
  • Kurtz, Anthony D; Gardner, Robert, Wet-to-wet pressure sensing assembly.
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