초록 ▼

A carbon monoxide detecting device which exhibits a stepwise change in film current over a preselected range in carbon monoxide concentration is disclosed. According to the present invention, in one embodiment, a first film predominantly of stannic oxide (SnO2) is formed on an insulating layer, and

A carbon monoxide detecting device which exhibits a stepwise change in film current over a preselected range in carbon monoxide concentration is disclosed. According to the present invention, in one embodiment, a first film predominantly of stannic oxide (SnO2) is formed on an insulating layer, and a second film predominantly of platinum (Pt) is formed on said first film. The second film is of an average film thickness of about 0.3 to 30 platinum atom layers. In another embodiment, gold (Au) is incorporated into said second film, and the second film is of an average film thickness of about 0.3 to 30 platinum atoms and the amount of gold ranges up to 50 atomic percent of the amount of platinum. In a third embodiment, a donor selected from the group consisting of antimony (Sb) and bismuth (Bi) is incorporated into the first film, and an intermediate film predominantly of stannic oxide (SnO2) having an acceptor selected from the group consisting of platinum (Pt), aluminum (Al), and boron (B) is formed intermediate said first and second films. The first, intermediate, and second films are formed, for example, by a high frequency reactive sputtering method.

대표청구항 ▼

A detector for a carbon monoxide gas comprising: (a) an insulating substrate; (b) a first film predominantly of stannic oxide (SnO2) formed on said insulating substrate, and wherein a donor selected from the group consisting of antimony and bismuth is incorporated into said first film; (c) a second

A detector for a carbon monoxide gas comprising: (a) an insulating substrate; (b) a first film predominantly of stannic oxide (SnO2) formed on said insulating substrate, and wherein a donor selected from the group consisting of antimony and bismuth is incorporated into said first film; (c) a second film predominantly of platinum formed on said first film; and (d) a film intermediate said first and second film, said intermediate film predominantly comprising stannic oxide and having an acceptor selected from the group consisting of platinum, aluminum, and boron.