초록 ▼

Vacuum coating apparatus having a vacuum chamber containing at least one cathode system and having a system for the continuous or intermittent transport of substrates during the coating. The transport system includes flexible, endless conveyor means in pairs guided in the manner of two parallel chai

Vacuum coating apparatus having a vacuum chamber containing at least one cathode system and having a system for the continuous or intermittent transport of substrates during the coating. The transport system includes flexible, endless conveyor means in pairs guided in the manner of two parallel chain drives over wheel pairs positioned at a distance from one another in the formation of two straight runs. The substrates are fastened to the conveyors so as to be movable parallel to the cathode system. The straight runs of each endless conveyor is guided vertically at least in the area of the cathode systems.

대표청구항 ▼

Vacuum coating apparatus comprising vacuum chamber means containing at least one cathode sputtering system and having means for the continuous or intermittent transport of substrates during the coating, said transport means including flexible endless conveyor means in pairs guided in the manner of t

Vacuum coating apparatus comprising vacuum chamber means containing at least one cathode sputtering system and having means for the continuous or intermittent transport of substrates during the coating, said transport means including flexible endless conveyor means in pairs guided in the manner of two parallel chain drives over wheel pair means positioned at a distance from one another in the formation of two straight runs each, said substrates being fastened to the conveyor means so as to be movable parallel to the cathode system, the straight runs of each endless conveyor means being guided vertically at least in the area of the cathode system and wherein the vacuum chamber means includes a frame and two doors corresponding in size substantially to the frame profile positioned on each side of the frame and pivotably mounted thereon for movement between an open and closed position about a vertical axis, at least a portion of the functional devices of the apparatus being fastened to the doors.