초록 ▼

A slitted tubular member within a reaction chamber encloses a stack of spaced substrates on the surfaces of which are deposited material by chemical vapor-deposition. The tubular member is formed of susceptor material adapted for heating by RF energy or by electrically heated wire. Oscillating means

A slitted tubular member within a reaction chamber encloses a stack of spaced substrates on the surfaces of which are deposited material by chemical vapor-deposition. The tubular member is formed of susceptor material adapted for heating by RF energy or by electrically heated wire. Oscillating means disposed in the slit direct a gas flow into the spacings between the substrates, the stack of which is spaced from the tubular member. Oscillating means disposed in the slit direct a gas flow into the spacings between the substrates, the stack of which is spaced from the tubular member.

대표청구항 ▼

An apparatus for chemically vapor-depositing a material onto surfaces of a plurality of substrates within a reaction chamber wherein said substrates are heated while contacting said surfaces with a gaseous compound of said material to be deposited, the improvement comprising: a slitted tubular struc

An apparatus for chemically vapor-depositing a material onto surfaces of a plurality of substrates within a reaction chamber wherein said substrates are heated while contacting said surfaces with a gaseous compound of said material to be deposited, the improvement comprising: a slitted tubular structure positioned within said chamber and having a wall formed of susceptor material adapted to heat said substrates in said structure; means positioned within and spaced from said structure for supporting said substrates in a stack-like relationship wherein said surfaces are substantially parallel to each other and are separated by spacings; and oscillating gas means positioned within said slit for directing a flow of gas into said substrate spacings.