초록 ▼

A method is disclosed for controlling the delivery of vapor from a bubbler containing a supply of liquid through which a carrier gas is bubbled and from which bubbler vapor is delivered in a vapor stream entrained with the carrier gas. The method comprises the steps of sensing the ratio of vapor to

A method is disclosed for controlling the delivery of vapor from a bubbler containing a supply of liquid through which a carrier gas is bubbled and from which bubbler vapor is delivered in a vapor stream entrained with the carrier gas. The method comprises the steps of sensing the ratio of vapor to carrier gas in the vapor stream and applying heat to the liquid within the bubbler at rates relative to the sensed ratios of vapor to carrier gas being delivered from the bubbler in a vapor stream to hold the ratio constant. A vapor delivery control system is also disclosed which comprises a vaporizer, a heater thermally coupled with the vaporizer, and means for maintaining a supply of liquid in the vaporizer. The system further includes means for introducing a carrier gas into the vaporizer, means for conducting the carrier gas and vapors of the liquid entrained with the carrier gas from the vaporizer, means for sensing the ratio of vapor to carrier gas being conducted from the vaporizer, and means for controlling the heater responsive to the ratio of vapor to carrier gas sensed by the sensing means to hold the ratio constant.

대표청구항 ▼

A method of linearly controlling mass flow rates of delivery of vapor from a bubbler containing a supply of liquid through which a carrier gas is bubbled at preselected, mutually-diverse flow rates in which vapor pressure is not in steady state and from which bubbler vapor is delivered in a vapor st

A method of linearly controlling mass flow rates of delivery of vapor from a bubbler containing a supply of liquid through which a carrier gas is bubbled at preselected, mutually-diverse flow rates in which vapor pressure is not in steady state and from which bubbler vapor is delivered in a vapor stream entrained with the carrier gas, and with the method comprising the steps of sensing the ratio of vapor to carrier gas in the vapor stream and applying heat to the liquid within the bubbler at rates in direct relationship to the sensed ratios of vapor to carrier gas being delivered from the bubbler in the vapor stream to hold said ratio constant. A vapor delivery control system comprising a vaporizer; a heater thermally coupled with said vaporizer; means for maintaining a supply of liquid in said vaporizer; means for introducing a carrier gas into said vaporizer; means for conducting the carrier gas and vapors of the liquid entrained with the carrier gas from said vaporizer; means for sensing the ratio of vapor to carrier gas being conducted from said vaporizer; and means for controlling said heater directly responsive to ratios of vapor to carrier gas sensed by said sensing means, said controlling means including means for applying heat to the liquid in the vaporizer at rates in direct relationship to said sensed ratios to hold said ratio constant.