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특허 상세정보

Vapor delivery control system and method

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B01F-003/04   
미국특허분류(USC) 261/128 ; 73/204 ; 137/90 ; 219/272
출원번호 US-0137148 (1980-04-04)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 100  인용 특허 : 5
초록

A method is disclosed for controlling the delivery of vapor from a bubbler containing a supply of liquid through which a carrier gas is bubbled and from which bubbler vapor is delivered in a vapor stream entrained with the carrier gas. The method comprises the steps of sensing the ratio of vapor to carrier gas in the vapor stream and applying heat to the liquid within the bubbler at rates relative to the sensed ratios of vapor to carrier gas being delivered from the bubbler in a vapor stream to hold the ratio constant. A vapor delivery control system is ...

대표
청구항

A method of linearly controlling mass flow rates of delivery of vapor from a bubbler containing a supply of liquid through which a carrier gas is bubbled at preselected, mutually-diverse flow rates in which vapor pressure is not in steady state and from which bubbler vapor is delivered in a vapor stream entrained with the carrier gas, and with the method comprising the steps of sensing the ratio of vapor to carrier gas in the vapor stream and applying heat to the liquid within the bubbler at rates in direct relationship to the sensed ratios of vapor to c...

이 특허를 인용한 특허 피인용횟수: 100

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