초록 ▼

A locking device for use in the chuck of an optical alignment and exposure apparatus is disclosed. The locking device comprises a plurality of flat, flexible blades fastened in pairs to a chuck plate in the chuck. Between each pair of blades there is a stationary element fastened to a base member in

A locking device for use in the chuck of an optical alignment and exposure apparatus is disclosed. The locking device comprises a plurality of flat, flexible blades fastened in pairs to a chuck plate in the chuck. Between each pair of blades there is a stationary element fastened to a base member in the chuck. Vacuum cups are fastened to the blades so that the blades are clamped tightly against the stationary element when the vacuum cups are evacuated.

대표청구항 ▼

In a chuck for use in an optical alignment and exposure apparatus having a chuck plate supported in a base member and means for urging the chuck plate away from the base member, a locking mechanism for maintaining a fixed relationship between the chuck plate and the base member comprising: flexible

In a chuck for use in an optical alignment and exposure apparatus having a chuck plate supported in a base member and means for urging the chuck plate away from the base member, a locking mechanism for maintaining a fixed relationship between the chuck plate and the base member comprising: flexible blade means fastened to one of the chuck plate and base member; a brake element fastened to the other of the chuck plate and base member, and having a surface slidably in contact with a surface of the flexible blade means; and force applying means for urging the contacting surfaces of flexible blade means and the brake element together with sufficient force to prevent the flexible blade means and the brake element from sliding with respect to each other and to maintain a fixed separation between the chuck plate and the base member in response to an input stimulus.