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A plasma reactor includes a series of parallel disposed electrodes carried in a vacuum vessel chamber. The series of electrodes is adapted to have alternate polarities. Supporting brackets are provided for positioning workpieces, such as multilayer printed circuit boards, parallel to and between ele

A plasma reactor includes a series of parallel disposed electrodes carried in a vacuum vessel chamber. The series of electrodes is adapted to have alternate polarities. Supporting brackets are provided for positioning workpieces, such as multilayer printed circuit boards, parallel to and between electrodes of alternate polarities. The supporting brackets are electrically isolated from the electrodes. Furthermore, a uniform gas flow is directed across the surfaces of the workpieces upon their being subjected to a gas discharge plasma, by providing the plasma reactor with a parabolically-shaped door defining a parabolic surface within the vacuum vessel chamber, as well as vertically disposed baffle plates and at least three radial gas inlets located equidistantly about said chamber. The radial gas inlets have discharge ends directed at the parabolic surface of the door and are located between the baffle plates and the parabolic door surface. Parallel arrangement of electrodes, as well as the elements utilized in directing a uniform gas flow, provide uniform conditioning of workpieces positioned within the gas discharge plasma of the plasma reactor.

대표청구항 ▼

A plasma reactor suitable for conditioning workpieces in a gas discharge plasma, comprising: a vacuum vessel having a chamber therein; a series of parallel disposed electrodes supported in said vacuum vessel chamber, said series of electrodes adapted to have alternate polarities; and means for suppo

A plasma reactor suitable for conditioning workpieces in a gas discharge plasma, comprising: a vacuum vessel having a chamber therein; a series of parallel disposed electrodes supported in said vacuum vessel chamber, said series of electrodes adapted to have alternate polarities; and means for supporting workpieces to be conditioned in said plasma reactor between adjacent electrodes of said series of electrodes, said supporting means disposed in said vacuum vessel chamber and electrically isolated from said electrodes. In the method of conditioning workpieces in a gas discharge plasma utilizing a plasma reactor having a vacuum vessel with a chamber therein and a series of parallel disposed electrodes supported in said chamber, the steps comprising: disposing each workpiece between a pair of adjacent electrodes of said series of electrodes and electrically isolated therefrom; causing said series of electrodes to be of alternate polarities; and generating a gas discharge plasma in said chamber.