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Material handling system and method for manufacturing line

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65G-051/02
출원번호 US-0126597 (1980-03-03)
발명자 / 주소
  • Whelan Paul L. (Dallas TX)
출원인 / 주소
  • Texas Instruments Incorporated (Dallas TX 02)
인용정보 피인용 횟수 : 54  인용 특허 : 0

초록

Disclosed for use in a manufacturing line is a material handling system which can be utilized for electronic component manufacturing, such as semiconductor slices, at subatmospheric conditions. The articles to be subjected to various manufacturing steps are moved serially on a track of gas or air. A

대표청구항

A line for manufacturing an article comprising: a plurality of work stations, each of said work stations performs at least one manufacturing operation and at least one of said plurality of stations operates at subatmospheric pressures, storage means operatively connected to said subatmospheric work

이 특허를 인용한 특허 (54)

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