초록 ▼

By means of the nozzle, three gaseous curtains are formed converging on the surface of the substrate heated to a temperature of about 600°C. which is driven in translatory movement, the intermediate curtain being constituted by a gaseous reactant or a reactant diluted in a carrier gas and the two la

By means of the nozzle, three gaseous curtains are formed converging on the surface of the substrate heated to a temperature of about 600°C. which is driven in translatory movement, the intermediate curtain being constituted by a gaseous reactant or a reactant diluted in a carrier gas and the two lateral curtains being constituted by another naturally gaseous reactant or reactant diluted in a gas. The gaseous products of the reaction issuing from the nozzle are compelled to flow above a predetermined region of the substrate and these products are evacuated by suction by means of channels disposed at the extremities of this region of the substrate and a pump to which the channels are connected.

대표청구항 ▼

A process for continuously depositing on the surface of a substrate heated to high temperature a layer of a solid material resulting from the reaction of at least two reactants selected from gaseous reactants and reactants diluted in a gas, which process comprises forming discrete laminar streams of

A process for continuously depositing on the surface of a substrate heated to high temperature a layer of a solid material resulting from the reaction of at least two reactants selected from gaseous reactants and reactants diluted in a gas, which process comprises forming discrete laminar streams of each reactant and projecting these streams on said substrate by bringing the streams together in reciprocal tangential contact, while effecting relative displacement of said streams and the substrate in such a manner that said streams are applied successively to different regions of the substrate, characterised in that each said stream has the form of rectilinear gas curtains, the transverse profile of each said stream converging towards an imaginary edge common to all the said streams, that these curtains and the substrate are disposed in such a manner that said edge is substantially in the plane of the said surface of the substrate, that the said substrate and said curtains are displaced relative to each other in a direction substantially perpendicular to the said common edge in such a manner that the said edge remains substantially in the plane of the said surface of the substrate, that the gases evolving from the reaction which results from the impact of said stream on the substrate are compelled to flow above a predetermined portion of this substrate extending on each side of said edge, and that these gases are evacuated at the extremity of said substrate portion located opposite the said imaginary common edge of said curtains.