$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Wafer transfer system 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-015/00
출원번호 US-0106342 (1979-12-21)
발명자 / 주소
  • Coad George L. (Lafayette CA) Shaw R. Howard (Palo Alto CA) Hutchinson Martin A. (Santa Clara CA)
출원인 / 주소
  • Varian Associates, Inc. (Palo Alto CA 02)
인용정보 피인용 횟수 : 127  인용 특허 : 0

초록 ▼

A system for the automated handling and transfer of wafers individually and repetitively to and between processing stations and cassettes. A track-like conveyor engages a cassette holding a plurality of wafers in vertically facing alignment, to move same horizontally past a loading station of a proc

대표청구항 ▼

Wafer load lock and feed system for vacuum chamber having an entrance opening in a wall thereof, and a door for sealing said opening, comprising: a plate-like wafer support within said chamber immediately behind said opening, and provided with an aperture alignable with said opening and of a diamete

이 특허를 인용한 특허 (127)

  1. Lee, Yi-Lung, Ancillary apparatus and method for loading glass substrates into a bracket.
    상세보기
  2. Allison Quincy D. (Boulder Creek CA), Apparatus and method of aligning notches using a free-floating rod.
    상세보기
  3. Scales Martin N. ; Pechin David A. ; Benzing Jeffrey C. ; Stowell R. Marshall, Apparatus for aligning substrate to chuck in processing chamber.
    상세보기
  4. Mears Eric L. (Rockport MA) Hertel Richard J. (Boxford MA) Brick Robert V. (Gloucester MA) Holt ; Jr. Carl J. (Newburyport MA), Apparatus for retaining wafers.
    상세보기
  5. Mears Eric L. (Rockport MA) Hertel Richard J. (Bradford MA) Brick Robert V. (Gloucester MA), Apparatus for retaining wafers.
    상세보기
  6. Kawakami Hiroshi (Kanagawa JPX), Autochanger type disc player.
    상세보기
  7. Doherty, Brian J.; Mariano, Thomas R.; Sullivan, Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
    상세보기
  8. Doherty, Brian J.; Mariano, Thomas R.; Sullivan, Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
    상세보기
  9. Doherty, Brian J.; Mariano, Thomas R.; Sullivan, Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
    상세보기
  10. Doherty, Brian J.; Mariano, Thomas R.; Sullivan, Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
    상세보기
  11. Doherty,Brian J.; Mariano,Thomas R.; Sullivan,Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
    상세보기
  12. O'Dell, Jeffrey L.; Verburgt, Thomas; Harless, Mark; Watkins, Cory, Automated wafer defect inspection system and a process of performing such inspection.
    상세보기
  13. O'Dell, Jeffrey L.; Verburgt, Thomas; Harless, Mark; Watkins, Cory, Automated wafer defect inspection system and a process of performing such inspection.
    상세보기
  14. O'Dell, Jeffrey; Verburgt, Thomas; Harless, Mark; Watkins, Cory, Automated wafer defect inspection system and a process of performing such inspection.
    상세보기
  15. Uehara, Akira; Hijikata, Isamu; Nakane, Hisashi; Nakayama, Muneo, Automatic plasma processing device and heat treatment device.
    상세보기
  16. Cay Norman S. (Los Gatos CA) Bowers Gerald M. (Boonville CA), Automatic wafer loading method and apparatus.
    상세보기
  17. Muka Richard S. (Topsfield MA) Russo Carl J. (Ipswitch MA), Blackbody radiation source with constant planar energy flux.
    상세보기
  18. Kerschner Ronald K. (Loveland CO) Hayes James M. (Loveland CO) Bullock Michael L. (Loveland CO), Board fixturing system.
    상세보기
  19. Wytman Joe, Co-axial motorized wafer lift.
    상세보기
  20. Guidotti Daniel ; Lee Kam Leung, Continual flow rapid thermal processing apparatus and method.
    상세보기
  21. Tateishi Hideki (Yokohama JPX) Shimizu Tamotsu (Yokohama JPX) Aiuchi Susumu (Yokohama JPX) Iwashita Katsuhiro (Yokohama JPX) Nakamura Hiroshi (Fuchu JPX), Continuous sputtering apparatus.
    상세보기
  22. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Conveying system for a vacuum processing apparatus.
    상세보기
  23. Hoitz Gerd,DEX ; Kowatsch Ulrich,DEX ; Ueffinger Friedrich,DEX, Device for simplified vertical loading of an X-ray cassette into a transport receptacle of a processing apparatus for X-ray cassettes.
    상세보기
  24. Boys Donald R. (Cupertino CA) Graves Walter E. (San Jose CA), Dial deposition and processing apparatus.
    상세보기
  25. Boys Donald R. (Cupertino CA) Graves Walter E. (San Jose CA), Disk or wafer handling and coating system.
    상세보기
  26. Ryan John F. (San Diego CA) Wright John G. (Poway CA), Elevating jig for semi-conductor wafers and similar articles.
    상세보기
  27. Fosnight,William John; Bufano,Michael; Friedman,Gerald; Sullivan,Robert, Extractor/buffer.
    상세보기
  28. Rastegar, Abbas; Ma, Andy; Krick, Dave; Marmillion, Pat, Hot source cleaning system.
    상세보기
  29. Bonora, Anthony C.; Gould, Richard H., Integrated transport carrier and conveyor system.
    상세보기
  30. Noda Minoru (31-1 Kameido 6-chrome Koto-ku ; Tokyo JPX) Miyata Tsutomu (31-1 Kameido 6-chrome Koto-ku ; Tokyo JPX) Yamashita Yoshihiro (31-1 Kameido 6-chrome Koto-ku ; Tokyo JPX) Ohmura Kenji (31-1 K, Linear transfer device for wafery works.
    상세보기
  31. Ackley James W. (Los Altos CA), Load lock pumping mechanism.
    상세보기
  32. Hayden Thomas J. (2244 Mesa Verde Dr. Milpitas CA 95035), Method and apparatus for orienting semiconductor wafers.
    상세보기
  33. Price, JB; Keller, Jed; Dulmage, Laurence; Cheng, David, Method and apparatus for semiconductor processing.
    상세보기
  34. Prabhakar Rakesh (Castro Valley CA) Benavides A. Fernando (Round Rock TX) Nitescu Petru (Fremont CA) Ebbing Peter (Los Altos CA), Method of aligning wafers and device therefor.
    상세보기
  35. Keigler Arthur, Method of and apparatus for handling thin and flat workpieces and the like.
    상세보기
  36. Bayne Christopher J. (Lightwater GB2), Methods of and apparatus for transferring articles between carrier members.
    상세보기
  37. Vora Mahasukh (Beverly MA) Malhotra Rajender (Beverly MA), Missing or broken wafer sensor.
    상세보기
  38. Hertel Richard J. (Bradford MA) Klos Leo V. (Newburyport MA), Multiple wafer holder for a wafer transfer system.
    상세보기
  39. Charbonnet Carl D. (4800 Divison Ave. Birmingham AL 35222), Panel transferring apparatus.
    상세보기
  40. Keigler, Arthur; Goodman, Daniel L.; Guarnaccia, David G., Parallel single substrate marangoni module.
    상세보기
  41. Keigler, Arthur; Fisher, Freeman; Goodman, Daniel L., Parallel single substrate processing system.
    상세보기
  42. Keigler, Arthur; Fisher, Freeman; Goodman, Daniel L.; Haynes, Jonathan, Parallel single substrate processing system.
    상세보기
  43. Keigler, Arthur, Parallel single substrate processing system with alignment features on a process section frame.
    상세보기
  44. Tsutsui Shinji (Kawasaki JPX) Shimoda Isamu (Zama JPX), Photomask positioning device.
    상세보기
  45. Muka Richard S. (Topsfield MA) Russo Carl J. (Ipswitch MA), Process for treating a semiconductor material by blackbody radiation source with constant planar energy flux.
    상세보기
  46. Rubin Richard H. (West Paterson NJ) Hillman Gary (Livingston NJ), Processing apparatus and method.
    상세보기
  47. Dill Charles T., Rotatable wafer handler with retractable stops.
    상세보기
  48. Brossman ; Jr. James W. (Bethel PA) Nemeth Carol A. (Reading PA) Shapiro Alan K. (Shillington PA), Selecting articles from an array thereof.
    상세보기
  49. Maydan Dan (Los Altos Hills CA) Somekh Sasson R. (Redwood City CA) Ryan-Harris Charles (La Honda CA) Seilheimer Richard A. (Pleasanton CA) Cheng David (San Jose CA) Abolnikov Edward M. (San Francisco, Semiconductor processing system with robotic autoloader and load lock.
    상세보기
  50. Muka Richard S. (Topsfield MA) Russo Carl J. (Ipswitch MA), Semiconductor processor incorporating blackbody radiation source with constant planar energy flux.
    상세보기
  51. Kakehi Yutaka (Hikari JPX), Semiconductor substrate transport system.
    상세보기
  52. Wilkinson Thomas F. (Garland TX) Ishii Kaoru (Garland TX), Semiconductor wafer carrier guide tracks.
    상세보기
  53. Butler Robert M. (Tempe AZ), Semiconductor wafer transfer apparatus and method.
    상세보기
  54. Graves, Jr., Walter E., Substrate and substrate holder.
    상세보기
  55. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Substrate changing-over mechanism in a vaccum tank.
    상세보기
  56. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Substrate changing-over mechanism in vacuum tank.
    상세보기
  57. Maher Joseph A. ; Vowles E. John ; Napoli Joseph D. ; Zafiropoulo Arthur W. ; Miller Mark W., System for processing substrates.
    상세보기
  58. Risca Mihai S., Thermal interface member.
    상세보기
  59. Yamazaki Takashi (Katsuta JPX) Sakai Hiroyuki (Ibaraki JPX) Sugano Hiroshi (Katsuta JPX) Moriyama Shigeo (Tama JPX), Transfer apparatus.
    상세보기
  60. Hutchinson, Martin A.; Shaw, R. Howard; Coad, George, Transfer plate rotation system.
    상세보기
  61. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Transferring device for a vacuum processing apparatus and operating method therefor.
    상세보기
  62. Foulke Richard F. (Carlisle MA) Winchell Kenneth A. (Melrose MA), Vacuum pickup apparatus.
    상세보기
  63. Kato Shigekazu,JPX ; Nishihata Kouji,JPX ; Tsubone Tsunehiko,JPX ; Itou Atsushi,JPX, Vacuum processing and operating method.
    상세보기
  64. Kato Shigekazu,JPX ; Nishihata Kouji,JPX ; Tsubone Tsunehiko,JPX ; Itou Atsushi,JPX, Vacuum processing and operating method.
    상세보기
  65. Kato Shigekazu,JPX ; Nishihata Kouji,JPX ; Tsubone Tsunehiko,JPX ; Itou Atsushi,JPX, Vacuum processing and operating method using a vacuum chamber.
    상세보기
  66. Kato Shigekazu,JPX ; Nishihata Kouji,JPX ; Tsubone Tsunehiko,JPX ; Itou Atsushi,JPX, Vacuum processing and operating method with wafers, substrates and/or semiconductors.
    상세보기
  67. Kato Shigekazu,JPX ; Nishihata Kouji,JPX ; Tsubone Tsunehiko,JPX ; Itou Atsushi,JPX, Vacuum processing apparatus.
    상세보기
  68. Kato Shigekazu,JPX ; Nishihata Kouji,JPX ; Tsubone Tsunehiko,JPX ; Itou Atsushi,JPX, Vacuum processing apparatus.
    상세보기
  69. Kato, Shigekazu; Nishihata, Kouji; Tsubone, Tsunehiko; Itou, Atsushi, Vacuum processing apparatus.
    상세보기
  70. Kato, Shigekazu; Nishihata, Kouji; Tsubone, Tsunehiko; Itou, Atsushi, Vacuum processing apparatus.
    상세보기
  71. Kato, Shigekazu; Nishihata, Kouji; Tsubone, Tsunehiko; Itou, Atsushi, Vacuum processing apparatus.
    상세보기
  72. Kato, Shigekazu; Nishihata, Kouji; Tsubone, Tsunehiko; Itou, Atsushi, Vacuum processing apparatus.
    상세보기
  73. Kato, Shigekazu; Nishihata, Kouji; Tsubone, Tsunehiko; Itou, Atsushi, Vacuum processing apparatus.
    상세보기
  74. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Vacuum processing apparatus.
    상세보기
  75. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Vacuum processing apparatus.
    상세보기
  76. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Vacuum processing apparatus.
    상세보기
  77. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Vacuum processing apparatus.
    상세보기
  78. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Vacuum processing apparatus.
    상세보기
  79. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Vacuum processing apparatus.
    상세보기
  80. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Vacuum processing apparatus.
    상세보기
  81. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Vacuum processing apparatus.
    상세보기
  82. Kato Shigekazu,JPX ; Nishihata Kouji,JPX ; Tsubone Tsunehiko,JPX ; Itou Atsushi,JPX, Vacuum processing apparatus and operating method therefor.
    상세보기
  83. Kato Shigekazu,JPX ; Nishihata Kouji,JPX ; Tsubone Tsunehiko,JPX ; Itou Atsushi,JPX, Vacuum processing apparatus and operating method therefor.
    상세보기
  84. Kato Shigekazu,JPX ; Nishihata Kouji,JPX ; Tsubone Tsunehiko,JPX ; Itou Atsushi,JPX, Vacuum processing apparatus and operating method therefor.
    상세보기
  85. Kato Shigekazu,JPX ; Nishihata Kouji,JPX ; Tsubone Tsunehiko,JPX ; Itou Atsushi,JPX, Vacuum processing apparatus and operating method therefor.
    상세보기
  86. Kato Shigekazu,JPX ; Nishihata Kouji,JPX ; Tsubone Tsunehiko,JPX ; Itou Atsushi,JPX, Vacuum processing apparatus and operating method therefor.
    상세보기
  87. Kato Shigekazu,JPX ; Nishihata Kouji,JPX ; Tsubone Tsunehiko,JPX ; Itou Atsushi,JPX, Vacuum processing apparatus and operating method therefor.
    상세보기
  88. Kato Shigekazu,JPX ; Nishihata Kouji,JPX ; Tsubone Tsunehiko,JPX ; Itou Atsushi,JPX, Vacuum processing apparatus and operating method therefor.
    상세보기
  89. Kato Shigekazu,JPX ; Nishihata Kouji,JPX ; Tsubone Tsunehiko,JPX ; Itou Atsushi,JPX, Vacuum processing apparatus and operating method therefor.
    상세보기
  90. Kato, Shigekazu; Nishihata, Kouji; Tsubone, Tsunehiko; Itou, Atsushi, Vacuum processing apparatus and operating method therefor.
    상세보기
  91. Kato, Shigekazu; Nishihata, Kouji; Tsubone, Tsunehiko; Itou, Atsushi, Vacuum processing apparatus and operating method therefor.
    상세보기
  92. Kato, Shigekazu; Nishihata, Kouji; Tsubone, Tsunehiko; Itou, Atsushi, Vacuum processing apparatus and operating method therefor.
    상세보기
  93. Kato, Shigekazu; Nishihata, Kouji; Tsubone, Tsunehiko; Itou, Atsushi, Vacuum processing apparatus and operating method therefor.
    상세보기
  94. Kato, Shigekazu; Nishihata, Kouji; Tsubone, Tsunehiko; Itou, Atsushi, Vacuum processing apparatus and operating method therefor.
    상세보기
  95. Kato,Shigekazu; Nishihata,Kouji; Tsubone,Tsunehiko; Itou,Atsushi, Vacuum processing apparatus and operating method therefor.
    상세보기
  96. Kato,Shigekazu; Nishihata,Kouji; Tsubone,Tsunehiko; Itou,Atsushi, Vacuum processing apparatus and operating method therefor.
    상세보기
  97. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Vacuum processing apparatus and operating method therefor.
    상세보기
  98. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Vacuum processing apparatus and operating method therefor.
    상세보기
  99. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Vacuum processing apparatus and operating method therefor.
    상세보기
  100. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Vacuum processing apparatus and operating method therefor.
    상세보기
  101. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Vacuum processing apparatus and operating method therefor.
    상세보기
  102. Kato,Shigekazu; Nishihata,Kouji; Tsubone,Tsuenhiko; Itou,Atsushi, Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors.
    상세보기
  103. Kato,Shigekazu; Nishihata,Kouji; Tsubone,Tsunehiko; Itou,Atsushi, Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors.
    상세보기
  104. Derbinski Senia L. ; Parker Richard Fred, Vacuum processing apparatus with low particle generating wafer clamp.
    상세보기
  105. Kato, Shigekazu; Nishihata, Kouji; Tsubone, Tsunehiko; Itou, Atsushi, Vacuum processing equipment configuration.
    상세보기
  106. Shigekazu Kato JP; Kouji Nishihata JP; Tsunehiko Tsubone JP; Atsushi Itou JP, Vacuum processing equipment configuration.
    상세보기
  107. Kato,Shigekazu; Nishihata,Kouji; Tsubone,Tsuenhiko; Itou,Atsushi, Vacuum processing operating method with wafers, substrates and/or semiconductors.
    상세보기
  108. Kato,Shigekazu; Nishihata,Kouji; Tsubone,Tsunehiko; Itou,Atsushi, Vacuum processing operating method with wafers, substrates and/or semiconductors.
    상세보기
  109. Kato,Shigekazu; Nishihata,Kouji; Tsubone,Tsunehiko; Itou,Atsushi, Vacuum processing operating method with wafers, substrates and/or semiconductors.
    상세보기
  110. Tamai,Tadamoto, Vacuum processing system being able to carry process object into and out of vacuum chamber.
    상세보기
  111. Wu, Kung Chris, Wafer aligner.
    상세보기
  112. Turner Frederick T. (Sunnyvale CA) Hutchinson Martin A. (Santa Clara CA) Shaw R. H. (Palo Alto CA) Lamont ; Jr. Lawrence T. (Mountain View CA), Wafer coating system.
    상세보기
  113. Reiss Ira, Wafer holder and clamping ring therefor for use in a deposition chamber.
    상세보기
  114. Flint Alan G. (Los Gatos CA) Jacobs William G. (San Jose CA), Wafer loading apparatus.
    상세보기
  115. Hertel Richard J. (Bradford MA), Wafer orientation system.
    상세보기
  116. Shimane Kazuo (Kawasaki JPX), Wafer positioning mechanism using a notch formed on the wafer periphery.
    상세보기
  117. Dimock Jack A. (Santa Barbara CA), Wafer processing machine.
    상세보기
  118. Dimock Jack A. (Santa Barbara CA) Clarke Peter J. (Santa Barbara CA), Wafer processing machine.
    상세보기
  119. Dimock Jack A. (Santa Barbara CA) Woestenburg Dirk P. (Summerland CA), Wafer processing machine with evacuated wafer transporting and storage system.
    상세보기
  120. Shaw R. Howard (Palo Alto CA), Wafer support assembly.
    상세보기
  121. Ohkase Wataru (Sagamihara JPX), Wafer support device.
    상세보기
  122. Lee Steven N. (Irvine CA) Kim Jae Y. (Irvine CA), Wafer transfer apparatus.
    상세보기
  123. Kato Tomoo,JPX ; Kimura Keiji,JPX, Wafer transfer device.
    상세보기
  124. Hertel Richard J. (Bradford MA), Wafer transfer system.
    상세보기
  125. Hertel Richard J. (Bradford MA) Delforge Adrian C. (Rockport MA) Mears Eric L. (Rockport MA) MacIntosh Edward D. (Gloucester MA) Jennings Robert E. (Nethuen MA) Bhargava Akhil (Reading MA), Wafer transfer system.
    상세보기
  126. Hertel Richard J. (Bradford MA) MacIntosh Edward D. (Gloucester MA), Wafer transfer system.
    상세보기
  127. Corville Richard E. (Alameda CA), Workpiece accumulating and transporting apparatus.
    상세보기

관련 콘텐츠

섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로