초록 ▼

There are disclosed a laser treatment method and an apparatus therefor in which a laser beam is irradiated on an object to be treated. The laser beam emitted from a laser apparatus is divided into a plurality of fractional beams, and the fractional laser beams are reflected toward and irradiated on

There are disclosed a laser treatment method and an apparatus therefor in which a laser beam is irradiated on an object to be treated. The laser beam emitted from a laser apparatus is divided into a plurality of fractional beams, and the fractional laser beams are reflected toward and irradiated on an area to be irradiated of the object being treated after being compounded such that energy density distribution on the irradiated area is made substantially uniform in at least one direction.

대표청구항 ▼

A method of treating an object by a laser beam in which the object to be treated is irradiated by the laser beam, comprising the steps of: emitting a laser beam having a non-uniform symmetrical pattern of energy distribution from a laser apparatus; dividing said laser beam along at least one line of

A method of treating an object by a laser beam in which the object to be treated is irradiated by the laser beam, comprising the steps of: emitting a laser beam having a non-uniform symmetrical pattern of energy distribution from a laser apparatus; dividing said laser beam along at least one line of symmetry into a plurality of fractional laser beams each having a cross-sectional area which is equal to the cross-sectional area of the other fractional laser beams; and directing said plurality of fractional laser beams into overlapping relationship directly onto the surface of the object to be treated, in a manner so that the pattern of said overlapping beams on said surface has a substantially-rectangular form and the energy density distribution of said pattern is made substantially uniform along at least one dimension of said rectangular pattern.