초록 ▼

There is provided an apparatus for processing a surface of an object to be processed by utilizing microwave plasma within a plasma-producing chamber, which comprises a microwave power-generating means; a wave guide for transmitting microwaves generated from said microwave power-generating means; a c

There is provided an apparatus for processing a surface of an object to be processed by utilizing microwave plasma within a plasma-producing chamber, which comprises a microwave power-generating means; a wave guide for transmitting microwaves generated from said microwave power-generating means; a closed vessel constituting the plasma-producing chamber separated from said wave guide by a separating means; an antenna for transmitting microwaves, one end thereof protruding into the wave guide and another end thereof protruding into the closed vessel and a supporting means, for holding or supporting the electroconductive object to be processed, provided within the closed vessel and so attached to the antenna that the antenna and the electroconductive object may be electrically connected to each other.

대표청구항 ▼

An apparatus for processing a surface of an object to be processed by utilizing microwave plasma within a plasma producing chamber, which comprises; a microwave power-generating means; a wave guide for transmitting microwaves generated by said microwave power-generating means; a closed vessel consti

An apparatus for processing a surface of an object to be processed by utilizing microwave plasma within a plasma producing chamber, which comprises; a microwave power-generating means; a wave guide for transmitting microwaves generated by said microwave power-generating means; a closed vessel constituting the plasma producing chamber provided with an evacuating means and a gas introducing means, and separated from said wave guide by a separating means; an antenna for receiving and transmitting said microwaves, passing through said separating means so that one end thereof extends into the wave guide and the other end thereof extends into the closed vessel; and a supporting means provided within said closed vessel and attached to said antenna, capable of supporting an electroconductive object to be processed in such a manner that the antenna and the electroconductive object are electrically connected to each other.